Light Technology Institute, Karlsruhe Institute of Technology, Engesserstrasse 13, 76131Karlsruhe, Germany.
Departamento de Física Aplicada and Instituto Universitario de Materiales de Alicante (IUMA), Universidad de Alicante, 03080Alicante, Spain.
ACS Appl Mater Interfaces. 2023 Feb 15;15(6):8436-8445. doi: 10.1021/acsami.2c22920. Epub 2023 Jan 31.
To date, thermal nanoimprint lithography (NIL) for patterning hybrid perovskites has always involved an intricate etching step of a hard stamp material or its master. Here, we demonstrate for the first time the successful nanopatterning of a perovskite film by NIL with a low-cost polymeric stamp. The stamp consists of a dichromated gelatin grating structured by holographic lithography. The one-dimensional grating is imprinted into a perovskite film at 95 °C and 90 MPa for 10 min, resulting in a high quality second-order distributed feedback (DFB) laser. The laser exhibits an excellent performance with a threshold of 81 μJ/cm, a line width of 0.32 nm, and a pronounced linear polarization. This novel approach enables cost-effective fabrication of high-quality DFB lasers compatible with different perovskite compositions and photonic nanostructures for a wide range of applications.
迄今为止，用于图案化杂化钙钛矿的热纳米压印光刻（NIL）总是涉及硬压印模板材料或其母版的复杂刻蚀步骤。在这里，我们首次展示了通过使用低成本聚合物压印模板成功地对钙钛矿薄膜进行纳米图案化。该压印模板由全息光刻形成的双铬化明胶光栅组成。在 95°C 和 90 MPa 的条件下，将一维光栅压印到钙钛矿薄膜中 10 分钟，得到高质量的二阶分布式反馈（DFB）激光器。该激光器表现出优异的性能，阈值为 81 μJ/cm，线宽为 0.32nm，呈现明显的线性偏振。这种新方法能够以具有成本效益的方式制造出与各种钙钛矿成分和光子纳米结构兼容的高质量 DFB 激光器，适用于广泛的应用。
