Opt Lett. 2023 Feb 1;48(3):807-810. doi: 10.1364/OL.476819.
The design, fabrication, and characterization of a 16-element optical phased array (OPA) using a high index (n = 3.1) silicon-rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas over a wide steering range of >115° at a fixed wavelength of 1525 nm. A beam width of 6.3° has been measured at boresight, consistent with theory. We demonstrate SRN as a viable material choice for chip-scale OPA applications due to its high thermo-optic coefficient, high optical power handling capacity [negligible two-photon absorption (TPA)], wide transparency window, and CMOS compatibility.
我们展示了一种使用高折射率（n=3.1）富硅氮化硅（SRN）的 16 元光学相控阵（OPA）的设计、制造和特性。我们在固定波长为 1525nm 时，通过端射面天线实现了超过 115°的宽角范围的一维波束转向。在视轴处测量到的波束宽度为 6.3°，与理论值一致。我们证明了 SRN 由于其高热光系数、高光学功率处理能力[可忽略的双光子吸收（TPA）]、宽透明窗口以及与 CMOS 的兼容性，是一种用于芯片级 OPA 应用的可行材料选择。
