Yang Tingkai, Liu Changhua, Chen Tao, Shao Meng, Jiang Chun, Lu Changzheng, Song Shijun
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.
University of Chinese Academy of Sciences, Beijing 100049, China.
Materials (Basel). 2023 Feb 14;16(4):1582. doi: 10.3390/ma16041582.
Reaction-boned silicon carbide (RB-SiC) is considered a new material for large lightweight ground-based space telescopes due to its high specific stiffness, low thermal deformation, and excellent optical quality. The excellent mechanical properties of RB-SiC result in the low efficiency of traditional polishing and mechanical polishing. In this paper, a polishing method for RB-SiC based on a femtosecond laser is proposed to improve surface quality. A theoretical heat conduction model was established in the process of femtosecond laser irradiation of SiC. We analyzed the ablation type and calculated the single-pulse ablation threshold of SiC, which verified the feasibility of femtosecond laser polishing. Further, the effects of polishing parameters on the polished surface quality were analyzed by a series of experiments, and the optimal parameters were selected. It was observed to improve polishing efficiency and can replace the intermediate steps of traditional mechanical polishing.
反应烧结碳化硅（RB-SiC）因其高比刚度、低热变形和优异的光学质量，被认为是用于大型轻型地基太空望远镜的一种新材料。RB-SiC优异的机械性能导致传统抛光和机械抛光效率低下。本文提出一种基于飞秒激光的RB-SiC抛光方法以提高表面质量。在飞秒激光辐照SiC的过程中建立了理论热传导模型。我们分析了烧蚀类型并计算了SiC的单脉冲烧蚀阈值，验证了飞秒激光抛光的可行性。此外，通过一系列实验分析了抛光参数对抛光表面质量的影响，并选择了最佳参数。结果表明该方法提高了抛光效率，可替代传统机械抛光的中间步骤。
