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将丝网印刷的压电铌酸钾集成到可生物降解纸质基板上的低温处理。

Low-temperature processing of screen-printed piezoelectric KNbO with integration onto biodegradable paper substrates.

作者信息

Monroe Morgan M, Villanueva L Guillermo, Briand Danick

机构信息

École Polytechnique Fédérale de Lausanne (EPFL), Soft Transducers Laboratory, Institute of Mechanical Engineering, 2000 Neuchâtel, Switzerland.

École Polytechnique Fédérale de Lausanne (EPFL), Advanced NEMS Laboratory, Institute of Mechanical Engineering, 1015 Lausanne, Switzerland.

出版信息

Microsyst Nanoeng. 2023 Feb 23;9:19. doi: 10.1038/s41378-023-00489-0. eCollection 2023.

Abstract

The development of fully solution-processed, biodegradable piezoelectrics is a critical step in the development of green electronics towards the worldwide reduction of harmful electronic waste. However, recent printing processes for piezoelectrics are hindered by the high sintering temperatures required for conventional perovskite fabrication techniques. Thus, a process was developed to manufacture lead-free printed piezoelectric devices at low temperatures to enable integration with eco-friendly substrates and electrodes. A printable ink was developed for screen printing potassium niobate (KNbO) piezoelectric layers in microns of thickness at a maximum processing temperature of 120 °C with high reproducibility. Characteristic parallel plate capacitor and cantilever devices were designed and manufactured to assess the quality of this ink and evaluate its physical, dielectric, and piezoelectric characteristics; including a comparison of behaviour between conventional silicon and biodegradable paper substrates. The printed layers were 10.7-11.2 μm thick, with acceptable surface roughness values in the range of 0.4-1.1 μm. The relative permittivity of the piezoelectric layer was 29.3. The poling parameters were optimised for the piezoelectric response, with an average longitudinal piezoelectric coefficient for samples printed on paper substrates measured as  = 13.57 ± 2.84 pC/N; the largest measured value was 18.37 pC/N on paper substrates. This approach to printable biodegradable piezoelectrics opens the way forward for fully solution-processed green piezoelectric devices.

摘要

全溶液处理的可生物降解压电材料的开发是绿色电子发展中朝着全球减少有害电子废物迈出的关键一步。然而,近期的压电材料印刷工艺受到传统钙钛矿制造技术所需的高烧结温度的阻碍。因此,开发了一种在低温下制造无铅印刷压电器件的工艺,以实现与环保基板和电极的集成。开发了一种可印刷油墨,用于通过丝网印刷厚度为微米级的铌酸钾(KNbO)压电层,最高加工温度为120°C,且具有高重现性。设计并制造了特征性平行板电容器和悬臂装置,以评估这种油墨的质量,并评估其物理、介电和压电特性;包括比较传统硅基板和可生物降解纸质基板之间的性能。印刷层厚度为10.7 - 11.2μm,表面粗糙度值在0.4 - 1.1μm范围内可接受。压电层的相对介电常数为29.3。针对压电响应优化了极化参数,在纸质基板上印刷的样品的平均纵向压电系数测量为= 13.57±2.84 pC/N;在纸质基板上测得的最大值为18.37 pC/N。这种可印刷可生物降解压电材料的方法为全溶液处理的绿色压电器件开辟了前进的道路。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5479/9947171/47ac8af04228/41378_2023_489_Fig1_HTML.jpg

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