Ma Yifei, Zhao Ke, Han Jiemin, Han Bingkang, Wang Mei, Tong Zhaomin, Suhr Jonghwan, Xiao Liantuan, Jia Suotang, Chen Xuyuan
State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, Shanxi 030006, People's Republic of China.
Department of Polymer Science and Engineering, School of Mechanical Engineering, Sungkyunkwan University, Suwon, Gyeonggi 16419, Republic of Korea.
ACS Appl Mater Interfaces. 2023 Mar 15;15(10):13813-13821. doi: 10.1021/acsami.3c01175. Epub 2023 Mar 1.
Wearable sensors are vital for the development of electronic skins to improve health monitoring, robotic tactile sensing, and artificial intelligence. Active materials and the construction of microstructures in the sensitive layer are the dominating approaches to improve the performance of pressure sensors. However, it is still a challenge to simultaneously achieve a sensor with a high sensitivity and a wide detection range. In this work, using three-dimensional (3D) vertical graphene (VG) as an active material, in combination with micropyramid arrays and lumpy holders, the stress concentration effects are generated in nano-, micro-, and macroscales. Therefore, the lumpily pyramidal VG film-based pressure sensor (LPV sensor) achieves an ultrahigh sensitivity (131.36 kPa) and a wide response range (0.1-100 kPa). Finite element analysis demonstrates that the stress concentration effects are enhanced by the micropyramid arrays and lumpy structures in micro- and macroscales, respectively. Finally, the LPV pressure sensors are tested in practical applications, including wearable health monitoring and force feedback of robotic tactile sensing.
可穿戴传感器对于电子皮肤的发展至关重要，有助于改善健康监测、机器人触觉传感和人工智能。敏感层中的活性材料和微结构构建是提高压力传感器性能的主要方法。然而，同时实现具有高灵敏度和宽检测范围的传感器仍然是一项挑战。在这项工作中，使用三维（3D）垂直石墨烯（VG）作为活性材料，结合微金字塔阵列和块状支架，在纳米、微米和宏观尺度上产生应力集中效应。因此，基于块状金字塔VG薄膜的压力传感器（LPV传感器）实现了超高灵敏度（131.36 kPa）和宽响应范围（0.1 - 100 kPa）。有限元分析表明，微金字塔阵列和块状结构分别在微米和宏观尺度上增强了应力集中效应。最后，对LPV压力传感器进行了实际应用测试，包括可穿戴健康监测和机器人触觉传感的力反馈。
