Sun Rong, Xiao Peng, Sun Lei, Guo Dongliang, Wang Ye
State Grid Jiangsu Electric Power Co., Ltd., Research Institute, Nanjing 211103, China.
Joint International Research Laboratory of Information Display and Visualization, School of Electronic Science and Engineering, Southeast University, Nanjing 210096, China.
Sensors (Basel). 2024 Dec 19;24(24):8114. doi: 10.3390/s24248114.
Flexible thin-film pressure sensors have garnered significant attention due to their applications in industrial inspection and human-computer interactions. However, due to their ultra-thin structure, these sensors often exhibit lower performance, including a narrow pressure response range and low sensitivity, which constrains their further application. The most commonly used microstructure fabrication methods are challenging to apply to ultra-thin functional layers and may compromise the structural stability of the sensors. In this study, we present a novel design of a film pressure sensor with a double-sided microstructure sensing layer by adopting the template method. By incorporating the double-sided microstructures, the proposed thin-film pressure sensor can simultaneously achieve a high sensitivity value of 5.5 kPa and a wide range of 140 kPa, while maintaining a short response time of 120 ms and a low detection limit. This flexible film pressure sensor demonstrates considerable potential for distributed pressure sensing and industrial pressure monitoring applications.
柔性薄膜压力传感器因其在工业检测和人机交互中的应用而备受关注。然而，由于其超薄结构，这些传感器通常表现出较低的性能，包括压力响应范围窄和灵敏度低，这限制了它们的进一步应用。最常用的微结构制造方法难以应用于超薄功能层，并且可能会损害传感器的结构稳定性。在本研究中，我们采用模板法提出了一种具有双面微结构传感层的薄膜压力传感器的新颖设计。通过引入双面微结构，所提出的薄膜压力传感器可以同时实现5.5 kPa的高灵敏度值和140 kPa的宽范围，同时保持120 ms的短响应时间和低检测限。这种柔性薄膜压力传感器在分布式压力传感和工业压力监测应用中显示出巨大的潜力。
