Opt Express. 2023 Feb 27;31(5):7900-7906. doi: 10.1364/OE.475660.
InGaAs/AlGaAs multiple quantum well lasers grown on silicon (001) by molecular beam epitaxy have been demonstrated. By inserting InAlAs trapping layers into AlGaAs cladding layers, misfit dislocations easily located in the active region can be effectively transferred out of the active region. For comparison, the same laser structure without the InAlAs trapping layers was also grown. All these as-grown materials were fabricated into Fabry-Perot lasers with the same cavity size of 20 × 1000 µm. The laser with trapping layers achieved a 2.7-fold reduction in threshold current density under pulsed operation (5 µs-pulsed width, 1%-duty cycle) compared to the counterpart, and further realized a room-temperature continuous-wave lasing with a threshold current of 537 mA which corresponds to a threshold current density of 2.7 kA/cm. When the injection current reached 1000 mA, the single-facet maximum output power and slope efficiency were 45.3 mW and 0.143 W/A, respectively. This work demonstrates significantly improved performances of InGaAs/AlGaAs quantum well lasers monolithically grown on silicon, providing a feasible solution to optimize the InGaAs quantum well structure.
通过分子束外延在硅(001)上生长了 InGaAs/AlGaAs 多量子阱激光器。通过在 AlGaAs 包层中插入 InAlAs 捕获层,可以有效地将位于有源区的失配位错从有源区中转移出来。为了进行比较,还生长了没有 InAlAs 捕获层的相同激光结构。所有这些原始生长材料都被制成具有相同腔尺寸为 20×1000μm 的法布里-珀罗激光器。与没有捕获层的激光器相比,具有捕获层的激光器在脉冲操作(5μs 脉冲宽度,1%占空比)下的阈值电流密度降低了 2.7 倍,并且进一步实现了室温连续波激射,阈值电流为 537mA,相应的阈值电流密度为 2.7kA/cm。当注入电流达到 1000mA 时,单面对最大输出功率和斜率效率分别为 45.3mW 和 0.143W/A。这项工作展示了在硅上单片生长的 InGaAs/AlGaAs 量子阱激光器的性能得到了显著改善,为优化 InGaAs 量子阱结构提供了可行的解决方案。