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物理气相传输法生长的m面和c面AlN晶体的结构、表面及光学研究

Structural, Surface and Optical Studies of m- and c-Face AlN Crystals Grown by Physical Vapor Transport Method.

作者信息

Zhang Shuping, Yang Hong, Wang Lianshan, Cheng Hongjuan, Lu Haixia, Yang Yanlian, Wan Lingyu, Xu Gu, Feng Zhe Chuan, Klein Benjamin, Ferguson Ian T, Sun Wenhong

机构信息

Research Center for Optoelectronics Materials and Devices, School of Physical Science and Technology, Guangxi University, Nanning 530004, China.

Center on Nano-Energy Research, Laboratory of Optoelectronic Materials & Detection Technology, School of Physical Science and Technology, Guangxi University, Nanning 530004, China.

出版信息

Materials (Basel). 2023 Feb 25;16(5):1925. doi: 10.3390/ma16051925.

DOI:10.3390/ma16051925
PMID:36903040
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10004678/
Abstract

Bulk aluminum nitride (AlN) crystals with different polarities were grown by physical vapor transport (PVT). The structural, surface, and optical properties of m-plane and c-plane AlN crystals were comparatively studied by using high-resolution X-ray diffraction (HR-XRD), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. Temperature-dependent Raman measurements showed that the Raman shift and the full width at half maximum (FWHM) of the E (high) phonon mode of the m-plane AlN crystal were larger than those of the c-plane AlN crystal, which would be correlated with the residual stress and defects in the AlN samples, respectively. Moreover, the phonon lifetime of the Raman-active modes largely decayed and its line width gradually broadened with the increase in temperature. The phonon lifetime of the Raman TO-phonon mode was changed less than that of the LO-phonon mode with temperature in the two crystals. It should be noted that the influence of inhomogeneous impurity phonon scattering on the phonon lifetime and the contribution to the Raman shift came from thermal expansion at a higher temperature. In addition, the trend of stress with increasing 1000/temperature was similar for the two AlN samples. As the temperature increased from 80 K to ~870 K, there was a temperature at which the biaxial stress of the samples transformed from compressive to tensile stress, while their certain temperature was different.

摘要

通过物理气相传输(PVT)法生长了具有不同极性的块状氮化铝(AlN)晶体。利用高分辨率X射线衍射(HR-XRD)、X射线光电子能谱(XPS)和拉曼光谱对m面和c面AlN晶体的结构、表面和光学性质进行了对比研究。温度相关的拉曼测量结果表明,m面AlN晶体E(高)声子模的拉曼位移和半高宽(FWHM)大于c面AlN晶体,这分别与AlN样品中的残余应力和缺陷相关。此外,随着温度升高,拉曼活性模的声子寿命大幅衰减,其线宽逐渐变宽。在这两种晶体中,拉曼TO声子模的声子寿命随温度的变化小于LO声子模。需要注意的是,在较高温度下,非均匀杂质声子散射对声子寿命的影响以及对拉曼位移的贡献来自热膨胀。此外,两种AlN样品的应力随1000/温度升高的趋势相似。当温度从80 K升高到~870 K时,样品的双轴应力会在某一温度从压应力转变为拉应力,只是它们的特定温度不同。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/33f3b1824602/materials-16-01925-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/e5ff5385e55d/materials-16-01925-g0A1.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/6015bfd96317/materials-16-01925-g004.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/29b5ceeef050/materials-16-01925-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/c50b8cdb92c9/materials-16-01925-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/33f3b1824602/materials-16-01925-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/e5ff5385e55d/materials-16-01925-g0A1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/fb705c2f0c63/materials-16-01925-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/8455cd11ed48/materials-16-01925-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/f20cbb704d81/materials-16-01925-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/6015bfd96317/materials-16-01925-g004.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/c50b8cdb92c9/materials-16-01925-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/472c/10004678/33f3b1824602/materials-16-01925-g008.jpg

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