基于贵金属修饰金属氧化物薄膜的高频声表面波 CO 气体传感器的气/湿度灵敏度研究。

A Study on the Gas/Humidity Sensitivity of the High-Frequency SAW CO Gas Sensor Based on Noble-Metal-Modified Metal Oxide Film.

机构信息

School of Safety Engineering, Heilongjiang University of Science and Technology, Harbin 150022, China.

出版信息

Sensors (Basel). 2023 Feb 23;23(5):2487. doi: 10.3390/s23052487.

DOI:10.3390/s23052487

PMID:36904690

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10007527/

Abstract

In order to improve the response characteristics of the surface acoustic wave (SAW) sensor to trace gases, a SAW CO gas sensor based on a Pd-Pt/SnO/AlO film with a high-frequency response performance is proposed in this paper. The gas sensitivity and humidity sensitivity of trace CO gas are tested and analyzed under normal temperatures and pressures. The research results show that, compared with the frequency response of the Pd-Pt/SnO film, the CO gas sensor based on a Pd-Pt/SnO/AlO film has a higher frequency response performance, and the sensor has high-frequency response characteristics to CO gas with a concentration in the range of 10-100 ppm. The average response recovery time of 90% ranges from 33.4 s to 37.2 s, respectively. When the CO gas with a concentration of 30 ppm is tested repeatedly, its frequency fluctuation is less than 5%, indicating that the sensor has good stability. In the range of relative humidity (RH) from 25% to 75%, it also has high-frequency response characteristics for CO gas with a 20 ppm concentration.

摘要

为了提高表面声波（SAW）传感器对痕量气体的响应特性，本文提出了一种基于具有高频响应性能的 Pd-Pt/SnO/AlO 薄膜的 SAW CO 气体传感器。在常温常压下测试和分析了痕量 CO 气体的气体灵敏度和湿度灵敏度。研究结果表明，与 Pd-Pt/SnO 薄膜的频率响应相比，基于 Pd-Pt/SnO/AlO 薄膜的 CO 气体传感器具有更高的频率响应性能，并且该传感器对浓度在 10-100ppm 范围内的 CO 气体具有高频响应特性。90%的平均响应恢复时间分别为 33.4s 和 37.2s。当测试浓度为 30ppm 的 CO 气体时，其频率波动小于 5%，表明传感器具有良好的稳定性。在相对湿度（RH）范围从 25%到 75%的范围内，它对浓度为 20ppm 的 CO 气体也具有高频响应特性。