A novel method of high-throughput micro-and nanomechanical sample fabrication.

There is an increasing interest in understanding materials' mechanical properties at small length scales. Mechanical testing from nano- to meso-scale has seen a rapid development over the last decade, leading to a high demand of sample fabrication. In the present work, a novel method of micro-and nanomechanical sample preparation is introduced based on a new technique combining femtosecond laser and focused ion beam (FIB), namely LaserFIB. The new method greatly simplifies the sample preparation workflow by taking advantage of the fast milling-rate of femtosecond laser and the high precision of FIB. It significantly improves the processing efficiency and success rate, allowing for the high-throughput preparation of reproducible micro- and nanomechanical specimens. The novel method has far more advantages: (1) it allows for site-specific sample preparation based on scanning electron microscope (SEM) characterization (lateral and depth direction of bulk material) (2) following the new workflow, mechanical specimens are still connected to the bulk by its natural bonding, yielding more reliable mechanical testing results; (3) it extends the processable sample size to meso-scale while still remaining high precision and high efficiency; (4) the seamless transfer between laser and FIB/SEM chamber greatly reduces the risk of sample damage and is very friendly for environmental sensitive materials. The new method solves critical problems for high-throughput multiscale mechanical sample preparation, greatly contributing to the development of nano to meso-scale mechanical testing by making sample preparation efficient and convenient.