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用于超精密加工的压电致动器快速响应特性建模

Modeling of Rapid Response Characteristics of Piezoelectric Actuators for Ultra-Precision Machining.

作者信息

Zhong Bowen, Liao Zhan, Zhang Xi, Jin Ziqi, Sun Lining

机构信息

The College of Mechanical and Electrical Engineering, Soochow University, Suzhou 215137, China.

出版信息

Materials (Basel). 2023 Mar 11;16(6):2272. doi: 10.3390/ma16062272.

DOI:10.3390/ma16062272
PMID:36984152
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10053532/
Abstract

Piezoelectric actuators are characterized by high positioning accuracy, high stiffness and a fast response and are widely used in ultra-precision machining technologies such as fast tool servo technology and ultrasonic machining. The rapid response characteristics of piezoelectric actuators often determine the overall quality of machining. However, there has been little research on the fast response characteristics of piezoelectric actuators, and this knowledge gap will lead to low precision and poor quality of the final machining. The fast response characteristics of a piezoelectric actuator were studied in this work. Firstly, the piezoelectric actuator was divided into a no-load state and a load state according to the working state. A fast response analysis and output characteristic analysis were carried out, the corresponding dynamic model was established, and then the model was simulated. Finally, an experimental system was established to verify the dynamic model of the piezoelectric actuator's fast response by conducting an experiment in which the piezoelectric actuator bounces a steel ball. The experimental results verify the correctness of the model and show that the greater the cross-sectional area and height of the piezoelectric actuator, the higher the bouncing height of the ball, and the better the dynamic performance of the piezoelectric actuator. It is believed that this study has guiding significance for the application of the dynamic characteristics of piezoelectric actuators in the machining field.

摘要

压电致动器具有定位精度高、刚度高和响应速度快的特点，广泛应用于快速刀具伺服技术和超声加工等超精密加工技术中。压电致动器的快速响应特性往往决定了加工的整体质量。然而，目前对压电致动器快速响应特性的研究较少，这种知识缺口将导致最终加工精度低、质量差。本文对压电致动器的快速响应特性进行了研究。首先，根据工作状态将压电致动器分为空载状态和负载状态。进行了快速响应分析和输出特性分析，建立了相应的动力学模型，然后对模型进行了仿真。最后，建立了实验系统，通过压电致动器弹起钢球的实验来验证压电致动器快速响应的动力学模型。实验结果验证了模型的正确性，结果表明，压电致动器的横截面积和高度越大，钢球的弹起高度越高，压电致动器的动态性能越好。相信本研究对压电致动器动态特性在加工领域的应用具有指导意义。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/5cac01b96508/materials-16-02272-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/ca00628d0a1e/materials-16-02272-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/15f34b31b0bb/materials-16-02272-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/7724c1a5fee7/materials-16-02272-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/9d10d6620a63/materials-16-02272-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/ab8217d41bbe/materials-16-02272-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/a1e2005b1726/materials-16-02272-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/ee968305e4b6/materials-16-02272-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/5aece35bec62/materials-16-02272-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/5cac01b96508/materials-16-02272-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/ca00628d0a1e/materials-16-02272-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/15f34b31b0bb/materials-16-02272-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/7724c1a5fee7/materials-16-02272-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/9d10d6620a63/materials-16-02272-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/ab8217d41bbe/materials-16-02272-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/a1e2005b1726/materials-16-02272-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/ee968305e4b6/materials-16-02272-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/5aece35bec62/materials-16-02272-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4960/10053532/5cac01b96508/materials-16-02272-g009.jpg

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本文引用的文献

1
RETRACTED: Transient Response Characteristics Analysis of High-Power Piezoelectric Transducers.已撤回：高功率压电换能器的瞬态响应特性分析
Micromachines (Basel). 2022 Sep 29;13(10):1638. doi: 10.3390/mi13101638.
2
Development of Piezo-Actuated Two-Degree-of-Freedom Fast Tool Servo System.压电驱动两自由度快速刀具伺服系统的研制
Micromachines (Basel). 2019 May 22;10(5):337. doi: 10.3390/mi10050337.
3
A T-shape linear piezoelectric motor with single foot.一种单足T形直线压电电机。
Ultrasonics. 2015 Feb;56:551-6. doi: 10.1016/j.ultras.2014.10.010. Epub 2014 Oct 19.
4
Standing wave brass-PZT square tubular ultrasonic motor.驻波型铜-PZT 方管超声马达。
Ultrasonics. 2012 Sep;52(7):880-9. doi: 10.1016/j.ultras.2012.02.010. Epub 2012 May 16.