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石英挠性加速度计中电场耦合的噪声检测特性分析

Analysis of Noise-Detection Characteristics of Electric Field Coupling in Quartz Flexible Accelerometer.

作者信息

Zhang Zhigang, Zhao Dongxue, He Huiyong, Tang Lijun, He Qian

机构信息

School of Physics and Electronic Science, Changsha University of Science and Technology, Changsha 410114, China.

Hunan Provincial Key Laboratory of Flexible Electronic Materials Genome Engineering, Changsha 410114, China.

出版信息

Micromachines (Basel). 2023 Feb 25;14(3):535. doi: 10.3390/mi14030535.

DOI:10.3390/mi14030535
PMID:36984945
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10058819/
Abstract

The internal electric field coupling noise of a quartz flexible accelerometer (QFA) restricts the improvement of the measurement accuracy of the accelerometer. In this paper, the internal electric field coupling mechanism of a QFA is studied, an electric field coupling detection noise model of the accelerometer is established, the distributed capacitance among the components of the QFA is simulated, the structure of the detection noise transfer system of different carrier modulation differential capacitance detection circuits is analyzed, and the influence of each transfer chain on the detection noise is discussed. The simulation results of electric field coupling detection noise show that the average value of detection noise can reach 41.7 μg, which is close to the effective resolution of the QFA, 50 μg. This confirms that electric field coupling detection noise is a non-negligible factor affecting the measurement accuracy of the accelerometer. A method of adding a high-pass filter to the front of the phase-shifting circuit is presented to suppress the noise of electric field coupling detection. This method attenuates the average value of the detected noise by about 78 dB, and reduces the average value of the detected noise to less than 0.1 μg, which provides a new approach and direction for effectively breaking through the performance of the QFA.

摘要

石英挠性加速度计（QFA）的内部电场耦合噪声限制了加速度计测量精度的提高。本文研究了QFA的内部电场耦合机理，建立了加速度计的电场耦合检测噪声模型，对QFA各部件间的分布电容进行了仿真，分析了不同载波调制差分电容检测电路的检测噪声传递系统结构，并讨论了各传递链对检测噪声的影响。电场耦合检测噪声的仿真结果表明，检测噪声的平均值可达41.7μg，接近QFA的有效分辨率50μg。这证实了电场耦合检测噪声是影响加速度计测量精度的一个不可忽视的因素。提出了一种在移相电路前端添加高通滤波器的方法来抑制电场耦合检测噪声。该方法使检测噪声的平均值衰减约78dB，并将检测噪声的平均值降低到小于0.1μg，为有效突破QFA的性能提供了新的途径和方向。

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