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基于隧道磁阻效应的高精度加速度测量系统

High-Precision Acceleration Measurement System Based on Tunnel Magneto-Resistance Effect.

作者信息

Gao Lu, Chen Fang, Yao Yingfei, Xu Dacheng

机构信息

School of Electronic and Information Engineering, Soochow University, Suzhou 215006, China.

Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.

出版信息

Sensors (Basel). 2020 Feb 18;20(4):1117. doi: 10.3390/s20041117.

DOI:10.3390/s20041117
PMID:32085651
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7070936/
Abstract

A high-precision acceleration measurement system based on an ultra-sensitive tunnel magneto-resistance (TMR) sensor is presented in this paper. A "force-magnetic-electric" coupling structure that converts an input acceleration into a change in magnetic field around the TMR sensor is designed. In such a structure, a micro-cantilever is integrated with a magnetic field source on its tip. Under an acceleration, the mechanical displacement of the cantilever causes a change in the spatial magnetic field sensed by the TMR sensor. The TMR sensor is constructed with a Wheatstone bridge structure to achieve an enhanced sensitivity. Meanwhile, a low-noise differential circuit is developed for the proposed system to further improve the precision of the measured acceleration. The experimental results show that the micro-system achieves a measurement resolution of 19 μg/√Hz at 1 Hz, a scale factor of 191 mV/g within a range of ± 2 g, and a bias instability of 38 μg (Allan variance). The noise sources of the proposed system are thoroughly investigated, which shows that low-frequency 1/f noise is the dominant noise source. We propose to use a high-frequency modulation technique to suppress the 1/f noise effectively. Measurement results show that the 1/f noise is suppressed about 8.6-fold at 1 Hz and the proposed system resolution can be improved to 2.2 μg/√Hz theoretically with this high-frequency modulation technique.

摘要

本文提出了一种基于超灵敏隧道磁阻（TMR）传感器的高精度加速度测量系统。设计了一种“力-磁-电”耦合结构，该结构可将输入加速度转换为TMR传感器周围磁场的变化。在这种结构中，一个微悬臂梁在其尖端与一个磁场源集成在一起。在加速度作用下，悬臂梁的机械位移会导致TMR传感器所感测的空间磁场发生变化。TMR传感器采用惠斯通电桥结构构建，以实现更高的灵敏度。同时，为所提出的系统开发了一种低噪声差分电路，以进一步提高测量加速度的精度。实验结果表明，该微系统在1 Hz时实现了19 μg/√Hz的测量分辨率，在±2 g范围内的比例因子为191 mV/g，偏置不稳定性为38 μg（阿伦方差）。对所提出系统的噪声源进行了深入研究，结果表明低频1/f噪声是主要噪声源。我们提出使用高频调制技术来有效抑制1/f噪声。测量结果表明，在1 Hz时1/f噪声被抑制了约8.6倍，采用这种高频调制技术理论上可将所提出系统的分辨率提高到2.2 μg/√Hz。

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High resolution quartz flexure accelerometer based on laser self-mixing interferometry.基于激光自混合干涉测量法的高分辨率石英挠性加速度计。
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