Wittek Christian-G R, Steinhoff Lukas, Raumel Selina, Reißfelder Michael, Dencker Folke, Wurz Marc C
Institute of Micro Production Technology (IMPT), Leibniz University Hanover, 30823 Garbsen, Germany.
Reißfelder Profilschleifen GmbH, 75031 Eppingen, Germany.
Micromachines (Basel). 2023 Feb 28;14(3):580. doi: 10.3390/mi14030580.
Downsized and complex micro-machining structures have to meet quality requirements concerning geometry and convince through increasing functionality. The development and use of cutting tools in the sub-millimeter range can meet these demands and contribute to the production of intelligent components in biomedical technology, optics or electronics. This article addresses the development of double-edged micro-cutters, which consist of a two-part system of cutter head and shaft. The cutting diameters are between 50 and 200 μm. The silicon carbide cutting heads are manufactured from the solid material using microsystem technology. The substrate used can be structured uniformly via photolithography, which means that 5200 homogeneous micro-milling heads can be produced simultaneously. This novel batch approach represents a contrast to conventionally manufactured micro-milling cutters. The imprint is taken by means of reactive ion etching using a mask made of electroplated nickel. Within this dry etching process, characteristic values such as the etch rate and flank angle of the structures are critical and will be compared in a parameter analysis. At optimal parameters, an anisotropy factor of 0.8 and an etching rate of 0.34 µm/min of the silicon carbide are generated. Finally, the milling heads are diced and joined. In the final machining tests, the functionality is investigated and any signs of wear are evaluated. A tool life of 1500 mm in various materials could be achieved. This and the milling quality achieved are in the range of conventional micro-milling cutters, which gives a positive outlook for further development.
尺寸缩小且结构复杂的微加工结构必须满足有关几何形状的质量要求，并通过增加功能来令人信服。亚毫米范围内切削刀具的开发和使用能够满足这些需求，并有助于生物医学技术、光学或电子领域智能组件的生产。本文论述了双刃微型刀具的开发，该刀具由刀头和刀杆两部分组成。切削直径在50至200微米之间。碳化硅刀头采用微系统技术由固态材料制造而成。所使用的衬底可通过光刻均匀地进行结构化处理，这意味着可同时生产5200个均匀的微铣刀头。这种新颖的批量制造方法与传统制造的微铣刀形成对比。印记是通过使用电镀镍制成的掩模进行反应离子蚀刻获得的。在这个干法蚀刻过程中，诸如结构的蚀刻速率和刃带角度等特征值至关重要，并将在参数分析中进行比较。在最佳参数下，碳化硅的各向异性因子为0.8，蚀刻速率为0.34微米/分钟。最后，将铣刀头切割并连接起来。在最终的加工测试中，对其功能进行研究并评估磨损迹象。在各种材料中可实现1500毫米的刀具寿命。这一点以及所达到的铣削质量与传统微铣刀相当，为进一步发展带来了积极的前景。
