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通过多材料打印制造化学流体集成电路

Fabrication of Chemofluidic Integrated Circuits by Multi-Material Printing.

作者信息

Kutscher Alexander, Kalenczuk Paula, Shahadha Mohammed, Grünzner Stefan, Obst Franziska, Gruner Denise, Paschew Georgi, Beck Anthony, Howitz Steffen, Richter Andreas

机构信息

Institute of Semiconductors and Microsystems, Technische Universität Dresden, 01062 Dresden, Germany.

Institute of Clinical Chemistry and Laboratory Medicine, University Hospital Carl Gustav Carus, Fetscherstr. 74, 01307 Dresden, Germany.

出版信息

Micromachines (Basel). 2023 Mar 22;14(3):699. doi: 10.3390/mi14030699.

Abstract

Photolithographic patterning of components and integrated circuits based on active polymers for microfluidics is challenging and not always efficient on a laboratory scale using the traditional mask-based fabrication procedures. Here, we present an alternative manufacturing process based on multi-material 3D printing that can be used to print various active polymers in microfluidic structures that act as microvalves on large-area substrates efficiently in terms of processing time and consumption of active materials with a single machine. Based on the examples of two chemofluidic valve types, hydrogel-based closing valves and PEG-based opening valves, the respective printing procedures, essential influencing variables and special features are discussed, and the components are characterized with regard to their properties and tolerances. The functionality of the concept is demonstrated by a specific chemofluidic chip which automates an analysis procedure typical of clinical chemistry and laboratory medicine. Multi-material 3D printing allows active-material devices to be produced on chip substrates with tolerances comparable to photolithography but is faster and very flexible for small quantities of up to about 50 chips.

摘要

基于用于微流控的活性聚合物的组件和集成电路的光刻图案化具有挑战性,并且在实验室规模上使用传统的基于掩膜的制造工艺并不总是高效的。在此,我们提出一种基于多材料3D打印的替代制造工艺,该工艺可用于在微流控结构中打印各种活性聚合物,这些聚合物在大面积基板上作为微阀,在加工时间和活性材料消耗方面高效,并且只需一台机器。基于两种化学流体阀类型的示例,即基于水凝胶的关闭阀和基于聚乙二醇的打开阀,讨论了各自的打印程序、关键影响变量和特殊特性,并对组件的性能和公差进行了表征。通过一个特定的化学流体芯片展示了该概念的功能,该芯片可自动执行临床化学和检验医学中典型的分析程序。多材料3D打印允许在芯片基板上生产活性材料装置,其公差与光刻相当,但速度更快,对于少量高达约50个芯片的生产非常灵活。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f577/10052728/220a6ef8aaac/micromachines-14-00699-g001.jpg

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