不同旋转角度 AT 切条式石英晶体谐振器的力频特性研究。

Study of Force-Frequency Characteristics in AT-Cut Strip Quartz Crystal Resonators with Different Rotation Angles.

机构信息

School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.

出版信息

Sensors (Basel). 2023 Mar 10;23(6):2996. doi: 10.3390/s23062996.

DOI:10.3390/s23062996

PMID:36991707

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10058224/

Abstract

This paper investigated the force-frequency characteristics of AT-cut strip quartz crystal resonator (QCR) employing finite element analysis methods and experiments. We used the finite element analysis software COMSOL Multiphysics to calculate the stress distribution and particle displacement of the QCR. Moreover, we analyzed the impact of these opposing forces on the frequency shift and strains of the QCR. Meanwhile, the resonant frequency shifts, conductance, and quality factor (Q value) of three AT-cut strip QCRs with rotation angles of 30°, 40°, and 50° under different force-applying positions were tested experimentally. The results showed that the frequency shifts of the QCRs were proportional to the magnitude of the force. The highest force sensitivity was QCR with a rotation angle of 30°, followed by 40°, and 50° was the lowest. And the distance of the force-applying position from the -axis also affected the frequency shift, conductance, and Q value of the QCR. The results of this paper are instructive for understanding the force-frequency characteristics of strip QCRs with different rotation angles.

摘要

本文采用有限元分析方法和实验研究了 AT 切型条状石英晶体谐振器（QCR）的力频特性。我们使用有限元分析软件 COMSOL Multiphysics 来计算 QCR 的应力分布和颗粒位移。此外，我们分析了这些相反力对 QCR 频率偏移和应变的影响。同时，我们实验测试了三个 AT 切型条状 QCR 在不同受力位置下旋转角度为 30°、40°和 50°时的共振频率偏移、电导和品质因数（Q 值）。结果表明，QCR 的频率偏移与力的大小成正比。旋转角度为 30°的 QCR 具有最高的力灵敏度，其次是 40°，而旋转角度为 50°的 QCR 则具有最低的力灵敏度。此外，受力位置与 - 轴的距离也会影响 QCR 的频率偏移、电导和 Q 值。本文的研究结果对于理解不同旋转角度的条状 QCR 的力频特性具有指导意义。