Xu Qianqian, Zhou Ziji, Tan Chong, Pan Xiaohang, Wen Zhengji, Zhang Jinguo, Zhou Dongjie, Sun Yan, Chen Xin, Zhou Lei, Dai Ning, Chu Junhao, Hao Jiaming
State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China.
University of Chinese Academy of Sciences Beijing 100049 China.
Nanoscale Adv. 2023 Feb 23;5(7):2054-2060. doi: 10.1039/d2na00937d. eCollection 2023 Mar 28.
In this work, we experimentally demonstrate a new type of compact, low-cost, visible microbolometer based on metal-insulator-metal (MIM) planar subwavelength thin films, which exploits resonant absorption for spectral selectivity without additional filters and has the advantages of compact design, simple structure, cost-efficiency, and large format fabrication. The experimental results show that a proof-of-principle microbolometer exhibits spectrally selective properties in the visible frequency range. At a resonant absorption wavelength of 638 nm, a responsivity of about 10 mV W is achieved at room temperature at a bias current of 0.2 mA, which is about one order of magnitude higher than that of the control device (a bare Au bolometer). Our proposed approach provides a viable solution for the development of compact and inexpensive detectors.
在这项工作中，我们通过实验展示了一种新型的基于金属-绝缘体-金属（MIM）平面亚波长薄膜的紧凑型、低成本可见微测辐射热计，该微测辐射热计利用共振吸收实现光谱选择性，无需额外的滤波器，具有设计紧凑、结构简单、成本效益高和可大规模制造的优点。实验结果表明，原理验证微测辐射热计在可见频率范围内表现出光谱选择性特性。在638 nm的共振吸收波长下，室温下在0.2 mA的偏置电流下实现了约10 mV/W的响应度，这比对照器件（裸金测辐射热计）高出约一个数量级。我们提出的方法为开发紧凑且廉价的探测器提供了可行的解决方案。
