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轴上离轴式离轴系统用于自由曲面测量。

On-axis deflectometric system for freeform surface measurement.

出版信息

Opt Lett. 2023 Apr 15;48(8):1986-1989. doi: 10.1364/OL.486170.

Abstract

We propose an on-axis deflectometric system for the accurate measurement of freeform surfaces with large slope ranges. A miniature plane mirror is attached on the illumination screen to fold the optical path and achieve the on-axis deflectometric testing. Due to the existence of the miniature folding mirror, the deep-learning method is applied to recover the missing surface data in a single measurement. Low sensitivity to the calibration error of system geometry and high testing accuracy can be achieved with the proposed system. The feasibility and accuracy of the proposed system have been validated. The system is low in cost and simple in configuration, and it provides a feasible way for the flexible and general testing of freeform surfaces, with a significant potential of the application in on-machine testing.

摘要

我们提出了一种用于大斜率范围自由曲面精确测量的共轴离轴偏折系统。在照明屏幕上附加一个微型平面镜来折叠光路,实现共轴离轴测试。由于微型折叠镜的存在,可以应用深度学习方法在单次测量中恢复丢失的表面数据。所提出的系统对系统几何校准误差的敏感性低,测试精度高。已经验证了所提出系统的可行性和准确性。该系统成本低,结构简单,为自由曲面的灵活通用测试提供了一种可行的方法,在机上测试中有很大的应用潜力。

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