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金属有机化学气相沉积法合成钙钛矿型 BaCeO 和 BaCeYO 薄膜。

Metalorganic Chemical Vapor Deposition Approach to the Synthesis of Perovskite BaCeO and BaCeYO Thin Films.

机构信息

Dipartimento di Scienze Chimiche, Università di Catania, and INSTM UdR Catania, Viale A. Doria 6, I-95125 Catania, Italy.

出版信息

Molecules. 2023 Apr 7;28(8):3303. doi: 10.3390/molecules28083303.

DOI:10.3390/molecules28083303
PMID:37110536
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10146848/
Abstract

In the present energetic scenario, the development of materials with high potentiality in the technological fields of energy conversion processes, production and storage of hydrogen, are of great interest in the scientific community. In particular, we report for the first time the fabrication of crystalline and homogeneous barium-cerate-based materials in the form of thin films on various substrates. Starting from the β-diketonate precursor sources Ce(hfa)diglyme, Ba(hfa)tetraglyme and Y(hfa)diglyme (Hhfa = 1,1,1,5,5,5-hexafluoroacetylacetone; diglyme = bis(2-methoxyethyl)ether; tetraglyme = 2,5,8,11,14-pentaoxapentadecane), a metalorganic chemical vapor deposition (MOCVD) approach has been successfully applied to the fabrication of BaCeO and doped BaCeYO systems in the form of thin films. Structural, morphological and compositional analyses allowed for an accurate determination of the properties of deposited layers. The present approach represents a simple, easily scalable, and industrially appealing process for the production of compact and homogeneous barium cerate thin films.

摘要

在当前充满活力的背景下，开发在能源转化过程、氢气生产和储存等技术领域具有高潜力的材料，引起了科学界的极大兴趣。特别是，我们首次报道了以各种衬底上的薄膜形式制备结晶和均匀的钡铈基材料。从β-二酮前体源 Ce(hfa)diglyme、Ba(hfa)tetraglyme 和 Y(hfa)diglyme（Hhfa=1,1,1,5,5,5-六氟乙酰丙酮；diglyme=双（2-甲氧基乙基）醚；tetraglyme=2,5,8,11,14-五氧杂十五烷）开始，采用金属有机化学气相沉积（MOCVD）方法成功地制备了 BaCeO 和掺杂 BaCeYO 系统的薄膜形式。结构、形态和组成分析允许对沉积层的性质进行精确的确定。本方法代表了一种简单、易于扩展且具有工业吸引力的生产致密均匀的钡铈薄膜的方法。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/96e44fa9ce96/molecules-28-03303-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/4b1d69d73dca/molecules-28-03303-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/04e7080141ee/molecules-28-03303-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/0bb214818752/molecules-28-03303-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/b6ce4be0c629/molecules-28-03303-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/b23023cba59b/molecules-28-03303-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/97ab28f56dd3/molecules-28-03303-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/b7441119e7bb/molecules-28-03303-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/7761a1d0d898/molecules-28-03303-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/96e44fa9ce96/molecules-28-03303-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/4b1d69d73dca/molecules-28-03303-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/04e7080141ee/molecules-28-03303-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/0bb214818752/molecules-28-03303-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/b6ce4be0c629/molecules-28-03303-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/b23023cba59b/molecules-28-03303-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/97ab28f56dd3/molecules-28-03303-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/b7441119e7bb/molecules-28-03303-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/7761a1d0d898/molecules-28-03303-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/64ea/10146848/96e44fa9ce96/molecules-28-03303-g009.jpg

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本文引用的文献

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Sci Bull (Beijing). 2022 Nov 30;67(22):2305-2315. doi: 10.1016/j.scib.2022.11.006. Epub 2022 Nov 12.
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Journey of a molecule from the solid to the gas phase and : direct estimation of vapor pressure of alkaline-earth metalorganic precursors for atmospheric pressure vapor phase deposition of fluoride films.分子从固相到气相的历程以及：用于氟化物薄膜常压气相沉积的碱土金属有机前驱体蒸气压的直接估算
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位错 WS 螺旋的可控生长和形成机制。
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