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基于三反射镜系统光纤法珀干涉仪的紧凑谐和型游标传感器用于同时测量气压和温度。

Compact Harmonic Vernier Sensor Based on an In-Fiber FPI with Three Reflector System for Simultaneous Gas Pressure and Temperature Measurement.

机构信息

School of Physics, Northwest University, Xi'an 710069, China.

Photonics Research Centre, University Malaya, Kuala Lumpur 50603, Malaysia.

出版信息

Sensors (Basel). 2023 Apr 20;23(8):4142. doi: 10.3390/s23084142.

Abstract

In this work, we proposed a sensitivity-enhanced temperature sensor, a compact harmonic Vernier sensor based on an in-fiber Fabry-Perot Interferometer (FPI), with three reflective interfaces for the measurement of gas temperature and pressure. FPI consists of air and silica cavities formulated by single-mode optical fiber (SMF) and several short hollow core fiber segments. One of the cavity lengths is deliberately made larger to excite several harmonics of the Vernier effect that have different sensitivity magnifications to the gas pressure and temperature. The spectral curve could be demodulated using a digital bandpass filter to extract the interference spectrum according to the spatial frequencies of resonance cavities. The findings indicate that the material and structural properties of the resonance cavities have an impact on the respective temperature sensitivity and pressure sensitivity. The measured pressure sensitivity and temperature sensitivity of the proposed sensor are 114 nm/MPa and 176 pm/°C, respectively. Therefore, the proposed sensor combines ease of fabrication and high sensitivity, making it great potential for practical sensing measurements.

摘要

在这项工作中,我们提出了一种基于光纤法布里-珀罗干涉仪(FPI)的紧凑型谐和 Vernier 传感器,该传感器具有三个反射界面,用于测量气体温度和压力。FPI 由空气和二氧化硅腔组成,由单模光纤(SMF)和几个短的空心光纤段构成。故意使其中一个腔长变大,以激发 Vernier 效应的多个谐波,这些谐波对气体压力和温度的灵敏度放大倍数不同。可以使用数字带通滤波器对光谱曲线进行解调,根据谐振腔的空间频率提取干涉光谱。研究结果表明,谐振腔的材料和结构特性对相应的温度灵敏度和压力灵敏度有影响。所提出传感器的测量压力灵敏度和温度灵敏度分别为 114nm/MPa 和 176pm/°C。因此,所提出的传感器结合了易于制造和高灵敏度的优点,在实际传感测量中具有很大的潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/427d/10145519/d6599d357acd/sensors-23-04142-g001.jpg

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