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在高倍电子显微镜中应用薄连续金属膜的原理。

Rationale for the application of thin, continuous metal films in high magnification electron microscopy.

作者信息

Peters K R

出版信息

J Microsc. 1986 Apr;142(Pt 1):25-34. doi: 10.1111/j.1365-2818.1986.tb02734.x.

Abstract

Various metal films of different thicknesses were deposited on to a particle test specimen and their effects on topographic contrast generation and specimen preservation were determined. Tobacco mosaic virus adsorbed on to thin carbon supports or silicon chips was imaged in TEM or high resolution SE-I SEM at a magnification of 350,000X. Tantalum films of 1-2 nm (average mass) thickness produced best contrasts and prevented volume loss of the particles from electron beam damage. Excessively thick films of 5-10 nm thickness blanketed fine structures and caused severe volume losses. Discontinuous 2 nm thick films of gold or platinum decorated the surfaces, caused a loss in topographic contrasts and induced very high volume losses. Thin continuous metal films were necessary to generate high topographic contrast and to prevent volume loss from beam damage by providing sufficient mechanical stability for small topographic features and increased thermal conductivity of the specimen surface.

摘要

将不同厚度的各种金属膜沉积在颗粒测试样品上,并确定它们对形貌对比度生成和样品保存的影响。吸附在薄碳载体或硅芯片上的烟草花叶病毒在透射电子显微镜(TEM)或高分辨率二次电子成像扫描电子显微镜(SE-I SEM)下以350,000倍的放大倍数成像。厚度为1-2纳米(平均质量)的钽膜产生了最佳对比度,并防止了颗粒因电子束损伤而体积损失。厚度为5-10纳米的过厚膜覆盖了精细结构并导致严重的体积损失。2纳米厚的金或铂的不连续膜装饰了表面,导致形貌对比度损失并引起非常高的体积损失。薄的连续金属膜对于产生高形貌对比度以及通过为小形貌特征提供足够的机械稳定性和提高样品表面的热导率来防止因束损伤而导致的体积损失是必要的。

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