Opt Lett. 2023 May 1;48(9):2257-2260. doi: 10.1364/OL.485581.
We report a water medium-assisted composite laser cutting (WMACLC) technology for what is believed to be the first time to achieve single-pass separation of frosted glass (FG). The water medium was used to flatten the surface of FG to reduce the diffuse reflection and random refraction of the incident laser. The simulation results of picosecond pulsed laser Bessel beam (PPLBB) intensity distribution in FG showed that the peak intensity in the presence of water can reach about 24 times and 2.3 times that in the absence of water when the PPLBB is 0.08 mm and 0.3 mm below the upper surface of FG, respectively. A PPLBB with higher intensity can be formed along the thickness direction to realize the material modification. A coaxial CW laser provides the thermal tensile stress required for separation. Finally, high-quality separation of FG was achieved using the WMACLC technology with a speed of 50 mm/s. No deviation in the separation track and no edge collapse occurred. The roughness Sa of the separated sidewall is less than 0.3 µm.
我们报道了一种水介质辅助复合激光切割(WMACLC)技术,据信这是首次实现磨砂玻璃(FG)的单次分离。水介质用于使 FG 表面平整,以减少入射激光的漫反射和随机折射。在存在水的情况下,皮秒脉冲激光贝塞尔光束(PPLBB)在 FG 上表面以下 0.08 mm 和 0.3 mm 处的强度分布的模拟结果表明,峰值强度可以分别达到约 24 倍和 2.3 倍。可以沿厚度方向形成更高强度的 PPLBB,以实现材料改性。同轴 CW 激光提供了分离所需的热拉伸应力。最后,使用速度为 50 mm/s 的 WMACLC 技术实现了高质量的 FG 分离。分离轨迹没有偏差,边缘也没有坍塌。分离侧壁的粗糙度 Sa 小于 0.3 µm。