Markauskas Edgaras, Zubauskas Laimis, Račiukaitis Gediminas, Gečys Paulius
Center for Physical Sciences and Technology, Savanoriu Ave. 231, LT-02300 Vilnius, Lithuania.
Micromachines (Basel). 2023 Jan 10;14(1):176. doi: 10.3390/mi14010176.
The cutting quality and strength of strips cut with femtosecond-duration pulses were investigated for different thicknesses of borosilicate glass plates. The laser pulse duration was 350 fs, and cutting was performed in two environments: ambient air and water. When cutting in water, a thin flowing layer of water was formed at the front surface of the glass plate by spraying water mist next to a laser ablation zone. The energy of pulses greatly exceeded the critical self-focusing threshold in water, creating conditions favorable for laser beam filament formation. Laser cutting parameters were individually optimized for different glass thicknesses (110-550 µm). The results revealed that laser cutting of borosilicate glass in water is favorable for thicker glass (300-550 µm) thanks to higher cutting quality, higher effective cutting speed, and characteristic strength. On the other hand, cutting ultrathin glass plates (110 µm thickness) demonstrated almost identical performance and cutting quality results in both environments. In this paper, we studied cut-edge defect widths, cut-sidewall roughness, cutting throughput, characteristic strength, and band-like damage formed at the back surface of laser-cut glass strips.
针对不同厚度的硼硅酸盐玻璃板，研究了用飞秒脉冲切割的条带的切割质量和强度。激光脉冲持续时间为350飞秒，切割在两种环境中进行：环境空气和水中。在水中切割时，通过在激光烧蚀区旁边喷水雾，在玻璃板的前表面形成一层薄薄的流动水层。脉冲能量大大超过了水中的临界自聚焦阈值，创造了有利于激光束丝状形成的条件。针对不同的玻璃厚度（110 - 550微米）分别优化了激光切割参数。结果表明，在水中对硼硅酸盐玻璃进行激光切割有利于较厚的玻璃（300 - 550微米），这得益于更高的切割质量、更高的有效切割速度和特征强度。另一方面，切割超薄玻璃板（厚度为110微米）在两种环境中的性能和切割质量结果几乎相同。在本文中，我们研究了激光切割玻璃条带后表面的切割边缘缺陷宽度、切割侧壁粗糙度、切割产量、特征强度和带状损伤。
