Lee Heekwon, Wang Zhuoran, Rao Qing, Lee Sanghyeon, Huan Xiao, Liu Yu, Yang Jihyuk, Chen Mojun, Ki Dong-Keun, Kim Ji Tae
Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, 999077, China.
Department of Physics, The University of Hong Kong, Pokfulam Road, Hong Kong, 999077, China.
Adv Mater. 2023 Sep;35(35):e2301704. doi: 10.1002/adma.202301704. Epub 2023 Jun 30.
Thermometry, the process of measuring temperature, is one of the most fundamental tasks not only for understanding the thermodynamics of basic physical, chemical, and biological processes but also for thermal management of microelectronics. However, it is a challenge to acquire microscale temperature fields in both space and time. Here, a 3D printed micro-thermoelectric device that enables direct 4D (3D Space + Time) thermometry at the microscale is reported. The device is composed of freestanding thermocouple probe networks, fabricated by bi-metal 3D printing with an outstanding spatial resolution of a few µm. It shows that the developed 4D thermometry can explore dynamics of Joule heating or evaporative cooling on microscale subjects of interest such as a microelectrode or a water meniscus. The utilization of 3D printing further opens up the possibility to freely realize a wide range of on-chip, freestanding microsensors or microelectronic devices without the design restrictions by manufacturing processes.
温度测量，即测量温度的过程，不仅是理解基本物理、化学和生物过程热力学的最基本任务之一，也是微电子热管理的关键。然而，在空间和时间上获取微观尺度的温度场是一项挑战。在此，报道了一种3D打印的微型热电装置，它能够在微观尺度上实现直接的4D（3D空间+时间）温度测量。该装置由独立的热电偶探针网络组成，通过双金属3D打印制造，具有几微米的出色空间分辨率。结果表明，所开发的4D温度测量技术能够探索诸如微电极或水弯月面等感兴趣的微观对象上的焦耳热或蒸发冷却动力学。3D打印的应用进一步开辟了可能性，可自由实现各种片上、独立的微传感器或微电子器件，而不受制造工艺的设计限制。
