Optimizing the optical and magneto-optical response of all-dielectric metasurfaces with tilted side walls.

All-dielectric metasurfaces based on ferrimagnetic iron garnets are a promising platform for realizing ultra-compact magneto-optical (MO) devices with low loss. However, ferrimagnetic iron garnets are notorious for being intractable on fine nanopatterning, hindering the faithful fabrication of designed nanostructures. In this regard, it is important to assess the influence of fabrication imperfections on the performance of MO metasurfaces. Here, we investigate the optical properties of a MO metasurface with structural imperfections. As the most typical fabrication error, we studied the impact of the tilted side walls of cylindrical garnet disks that constitute the metasurfaces. We found that tilting the side walls drastically degrades the MO response and light transmittance of the device. Nevertheless, it was also found that the performance can be recovered by optimizing the refractive index of the material covering the upper half of the nanodisks.