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采用脉冲激光沉积法实现大面积 GeSe,用于超低噪声和超快宽带光电晶体管。

Large-Area GeSe Realized Using Pulsed Laser Deposition for Ultralow-Noise and Ultrafast Broadband Phototransistors.

机构信息

School of Interdisciplinary Research, Indian Institute of Technology Delhi, Hauz Khas, New Delhi 110016, India.

University of Queensland-IIT Delhi Academy of Research (UQIDAR), Hauz Khas, New Delhi 110016, India.

出版信息

ACS Appl Mater Interfaces. 2023 Jun 7;15(22):27285-27298. doi: 10.1021/acsami.3c02522. Epub 2023 May 22.

DOI:10.1021/acsami.3c02522
PMID:37216628
Abstract

Here, we report on the comprehensive growth, characterization, and optoelectronic application of large-area, two-dimensional germanium selenide (GeSe) layers prepared using the pulsed laser deposition (PLD) technique. Back-gated phototransistors based on few-layered 2D GeSe have been fabricated on a SiO/Si substrate for ultrafast, low noise, and broadband light detection, showing spectral functionalities over a broad wavelength range of 0.4-1.5 μm. The broadband detection capabilities of the device have been attributed to the self-assembled GeO/GeSe heterostructure and sub-bandgap absorption in GeSe. Besides a high photoresponsivity of 25 AW, the GeSe phototransistor displayed a high external quantum efficiency of the order of 6.14 × 10%, a maximum specific detectivity of 4.16 × 10 Jones, and an ultralow noise equivalent power of 0.09 pW/Hz. The detector has an ultrafast response/recovery time of 3.2/14.9 μs and can show photoresponse up to a high cut-off frequency of 150 kHz. These promising device parameters exhibited by PLD-grown GeSe layers-based detectors make it a favorable choice against present-day mainstream van der Waals semiconductors with limited scalability and optoelectronic compatibility in the visible-to-infrared spectral range.

摘要

在这里,我们报告了使用脉冲激光沉积(PLD)技术制备的大面积二维硒化锗(GeSe)层的综合生长、特性和光电应用。在 SiO2/Si 衬底上制备了基于少层二维 GeSe 的背栅光电晶体管,用于超快、低噪声和宽带光探测,显示出在 0.4-1.5 μm 宽波长范围内的光谱功能。该器件的宽带探测能力归因于 GeO/GeSe 异质结构和 GeSe 中的亚带隙吸收。除了 25 AW 的高光响应率外,GeSe 光电晶体管还显示出 6.14×10%的高外量子效率、4.16×10 琼斯的最大特定探测率和 0.09 pW/Hz 的超低噪声等效功率。探测器具有 3.2/14.9 μs 的超快响应/恢复时间,并且可以在高达 150 kHz 的高截止频率下显示光响应。这些由 PLD 生长的 GeSe 层基探测器表现出的有前景的器件参数,使得其成为在可见光到红外光谱范围内具有有限可扩展性和光电兼容性的当今主流范德华半导体的有利替代品。

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