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砷化铟镓/砷化镓(111)A 型红外光电探测器中低暗电流操作:界面失配位错的作用。

Low Dark Current Operation in InAs/GaAs(111)A Infrared Photodetectors: Role of Misfit Dislocations at the Interface.

机构信息

National Institute for Materials Science, Tsukuba, Ibaraki 305-0047, Japan.

出版信息

ACS Appl Mater Interfaces. 2023 Jun 21;15(24):29636-29642. doi: 10.1021/acsami.3c05725. Epub 2023 Jun 7.

DOI:10.1021/acsami.3c05725
PMID:37286339
Abstract

We demonstrate an extended short-wave infrared (-SWIR) photodetector composed of an InAs/GaAs(111)A heterostructure with interface misfit dislocations. The layer structure of the photodetector consists simply of an -InAs optical absorption layer directly grown with a thin undoped-GaAs spacer layer on -GaAs by molecular beam epitaxy. The lattice mismatch was abruptly relaxed by forming a misfit dislocation network at the initial stage of the InAs growth. We found high-density threading dislocations (1.5 × 10 cm) in the InAs layer. The current-voltage characteristics of the photodetector at 77 K had a very low dark current density (<1 × 10 A cm) at a positive applied voltage (electrons flow from -GaAs to -InAs) of up to ∼+1 V. Simulation of the band structure revealed that the direct connection of GaAs and InAs and the formation of interfacial states by the misfit dislocations play significant positive roles in suppressing dark current. Under illumination with -SWIR light at 77 K, a clear photocurrent signal was observed with a 2.6 μm cutoff wavelength, which is consistent with the bandgap of InAs. We also demonstrated -SWIR detection at room temperature with a 3.2 μm cutoff wavelength. The maximum detectivity at 294 K exceeds 2 × 10 cm Hz W for the detection of -SWIR light at 2 μm.

摘要

我们展示了一种扩展的短波长红外(-SWIR)光电探测器,由具有界面失配位错的 InAs/GaAs(111)A 异质结构组成。光电探测器的层结构简单地由 -InAs 光吸收层组成,该吸收层直接通过分子束外延在 -GaAs 上生长有薄的未掺杂 GaAs 间隔层。在 InAs 生长的初始阶段,通过形成位错网络,晶格失配得到了迅速松弛。我们在 InAs 层中发现了高密度的位错(1.5×10^cm^)。在 77 K 下,光电探测器的电流-电压特性在正偏压(电子从 -GaAs 流向 -InAs)高达约+1 V 的情况下,具有非常低的暗电流密度(<1×10^-10 A cm^)。能带结构的模拟表明,GaAs 和 InAs 的直接连接以及失配位错形成的界面态在抑制暗电流方面发挥了重要的积极作用。在 77 K 下用 -SWIR 光照射时,观察到具有 2.6 μm 截止波长的清晰光电流信号,这与 InAs 的能带隙一致。我们还在室温下演示了 -SWIR 检测,截止波长为 3.2 μm。在 294 K 下,对于 2 μm 的 -SWIR 光检测,最大探测率超过 2×10^10 cm Hz W。

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