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基于硅的短波长红外光电探测器,采用应变诱导生长的非常高的砷化铟纳米线阵列。

Short-wavelength infrared photodetector on Si employing strain-induced growth of very tall InAs nanowire arrays.

作者信息

Shin Hyun Wook, Lee Sang Jun, Kim Doo Gun, Bae Myung-Ho, Heo Jaeyeong, Choi Kyoung Jin, Choi Won Jun, Choe Jeong-woo, Shin Jae Cheol

机构信息

1] Korea Photonics Technology and Institute, Gwangju 550-779, Republic of Korea [2] Department of Applied Physics, Kyung Hee University, Yongin 446-701, Republic of Korea.

Korea Research Institute of Standards and Science, Daejeon, 305-340, Republic of Korea.

出版信息

Sci Rep. 2015 Jun 2;5:10764. doi: 10.1038/srep10764.

Abstract

One-dimensional crystal growth enables the epitaxial integration of III-V compound semiconductors onto a silicon (Si) substrate despite significant lattice mismatch. Here, we report a short-wavelength infrared (SWIR, 1.4-3 μm) photodetector that employs InAs nanowires (NWs) grown on Si. The wafer-scale epitaxial InAs NWs form on the Si substrate without a metal catalyst or pattern assistance; thus, the growth is free of metal-atom-induced contaminations, and is also cost-effective. InAs NW arrays with an average height of 50 μm provide excellent anti-reflective and light trapping properties over a wide wavelength range. The photodetector exhibits a peak detectivity of 1.9 × 10(8) cm · Hz(1/2)/W for the SWIR band at 77 K and operates at temperatures as high as 220 K. The SWIR photodetector on the Si platform demonstrated in this study is promising for future low-cost optical sensors and Si photonics.

摘要

尽管存在显著的晶格失配,一维晶体生长仍能实现III-V族化合物半导体在硅(Si)衬底上的外延集成。在此,我们报道了一种采用生长在Si上的砷化铟纳米线(NWs)的短波长红外(SWIR,1.4 - 3μm)光电探测器。晶圆级外延砷化铟纳米线在硅衬底上形成,无需金属催化剂或图案辅助;因此,该生长过程没有金属原子诱导的污染,并且具有成本效益。平均高度为50μm的砷化铟纳米线阵列在很宽的波长范围内具有出色的抗反射和光捕获特性。该光电探测器在77K时对SWIR波段的峰值探测率为1.9×10(8) cm·Hz(1/2)/W,并且在高达220K的温度下工作。本研究中展示的基于硅平台的SWIR光电探测器在未来低成本光学传感器和硅光子学方面具有广阔前景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6a84/4451803/57f4546f902d/srep10764-f1.jpg

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