Liu Zhihao, Hu Guangwei, Ye Huapeng, Wei Miaoyang, Guo Zhenghao, Chen Kexu, Liu Chen, Tang Biao, Zhou Guofu
Guangdong Provincial Key Laboratory of Optical Information Materials and Technology & Institute of Electronic Paper Displays, South China Academy of Advanced Optoelectronics, South China Normal University, Guangzhou, 510006, China.
National Center for International Research on Green Optoelectronics, South China Normal University, Guangzhou, 510006, China.
Light Sci Appl. 2023 Jun 7;12(1):143. doi: 10.1038/s41377-023-01174-7.
Microlens arrays (MLAs) based on the selective wetting have opened new avenues for developing compact and miniaturized imaging and display techniques with ultrahigh resolution beyond the traditional bulky and volumetric optics. However, the selective wetting lenses explored so far have been constrained by the lack of precisely defined pattern for highly controllable wettability contrast, thus limiting the available droplet curvature and numerical aperture, which is a major challenge towards the practical high-performance MLAs. Here we report a mold-free and self-assembly approach of mass-production of scalable MLAs, which can also have ultrasmooth surface, ultrahigh resolution, and the large tuning range of the curvatures. The selective surface modification based on tunable oxygen plasma can facilitate the precise pattern with adjusted chemical contrast, thus creating large-scale microdroplets array with controlled curvature. The numerical aperture of the MLAs can be up to 0.26 and precisely tuned by adjusting the modification intensity or the droplet dose. The fabricated MLAs have high-quality surface with subnanometer roughness and allow for record-high resolution imaging up to equivalently 10,328 ppi, as we demonstrated. This study shows a cost-effective roadmap for mass-production of high-performance MLAs, which may find applications in the rapid proliferating integral imaging industry and high-resolution display.
基于选择性润湿的微透镜阵列（MLA）为开发紧凑且小型化的成像和显示技术开辟了新途径，这些技术具有超越传统笨重体积光学器件的超高分辨率。然而，迄今为止所探索的选择性润湿透镜受到缺乏用于高度可控润湿性对比度的精确定义图案的限制，从而限制了可用的液滴曲率和数值孔径，这是实现实用高性能MLA的一个主要挑战。在此，我们报告一种无模具且可大规模生产可扩展MLA的自组装方法，该方法还可具有超光滑表面、超高分辨率以及大曲率调谐范围。基于可调谐氧等离子体的选择性表面改性能够促进具有调整后化学对比度的精确图案形成，从而创建具有可控曲率的大规模微液滴阵列。MLA的数值孔径可达0.26，并可通过调整改性强度或液滴剂量进行精确调谐。正如我们所展示的，所制备的MLA具有亚纳米粗糙度的高质量表面，并允许实现高达等效10328 ppi的创纪录高分辨率成像。这项研究展示了一条用于大规模生产高性能MLA的经济高效路线图，其可能在快速发展的积分成像行业和高分辨率显示中找到应用。
