水平腔面发射激光器的研究进展。

Research Progress of Horizontal Cavity Surface-Emitting Laser.

机构信息

State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.

Daheng College, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Sensors (Basel). 2023 May 24;23(11):5021. doi: 10.3390/s23115021.

DOI:10.3390/s23115021

PMID:37299747

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10255609/

Abstract

The horizontal cavity surface emitting laser (HCSEL) boasts excellent properties, including high power, high beam quality, and ease of packaging and integration. It fundamentally resolves the problem of the large divergence angle in traditional edge-emitting semiconductor lasers, making it a feasible scheme for realizing high-power, small-divergence-angle, and high-beam-quality semiconductor lasers. Here, we introduce the technical scheme and review the development status of HCSELs. Firstly, we thoroughly analyze the structure, working principles, and performance characteristics of HCSELs according to different structures, such as the structural characteristics and key technologies. Additionally, we describe their optical properties. Finally, we analyze and discuss potential development prospects and challenges for HCSELs.

摘要

水平腔面发射激光器（HCSEL）具有出色的性能，包括高功率、高光束质量以及易于封装和集成。它从根本上解决了传统边发射半导体激光器大发散角的问题，是实现高功率、小发散角、高光束质量半导体激光器的可行方案。在这里，我们介绍了 HCSEL 的技术方案和发展现状。首先，根据不同的结构，如结构特点和关键技术，我们对 HCSEL 的结构、工作原理和性能特点进行了深入分析。此外，我们还描述了它们的光学性质。最后，我们分析和讨论了 HCSEL 的潜在发展前景和挑战。