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高纵横比金刚石纳秒激光加工

High aspect ratio diamond nanosecond laser machining.

作者信息

Golota Natalie C, Preiss David, Fredin Zachary P, Patil Prashant, Banks Daniel P, Bahri Salima, Griffin Robert G, Gershenfeld Neil

机构信息

Department of Chemistry, Massachusetts Institute of Technology, Cambridge, MA 02139 USA.

Francis Bitter Magnet Laboratory, Massachusetts Institute of Technology, Cambridge, MA 02139 USA.

出版信息

Appl Phys A Mater Sci Process. 2023;129(7):490. doi: 10.1007/s00339-023-06755-2. Epub 2023 Jun 15.

DOI:10.1007/s00339-023-06755-2
PMID:37333570
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10271884/
Abstract

UNLABELLED

Laser processing of diamond has become an important technique for fabricating next generation microelectronic and quantum devices. However, the realization of low taper, high aspect ratio structures in diamond remains a challenge. We demonstrate the effects of pulse energy, pulse number and irradiation profile on the achievable aspect ratio with 532 nm nanosecond laser machining. Strong and gentle ablation regimes were observed using percussion hole drilling of type Ib HPHT diamond. Under percussion hole drilling a maximum aspect ratio of 22:1 was achieved with 10,000 pulses. To reach aspect ratios on average 40:1 and up to 66:1, rotary assisted drilling was employed using > 2 M pulse accumulations. We additionally demonstrate methods of obtaining 0.1° taper angles via ramped pulse energy machining in 10:1 aspect ratio tubes. Finally, effects of laser induced damage are studied using confocal Raman spectroscopy with observation of up to 36% increase in tensile strain following strong laser irradiation. However, we report that upon application of 600 °C heat treatment, induced strain is reduced by up to ~ 50% with considerable homogenization of observed strain.

SUPPLEMENTARY INFORMATION

The online version contains supplementary material available at 10.1007/s00339-023-06755-2.

摘要

未标注

金刚石的激光加工已成为制造下一代微电子和量子器件的一项重要技术。然而，在金刚石中实现低锥度、高纵横比的结构仍然是一个挑战。我们展示了脉冲能量、脉冲数和辐照轮廓对使用532纳米纳秒激光加工可实现的纵横比的影响。使用Ib型高温高压人造金刚石进行冲击钻孔时，观察到了强烧蚀和弱烧蚀状态。在冲击钻孔中，10000个脉冲实现了最大纵横比为22:1。为了达到平均纵横比为40:1以及高达66:1，采用了旋转辅助钻孔，使用了超过200万个脉冲累积。我们还展示了通过在纵横比为10:1的管中进行斜坡脉冲能量加工获得0.1°锥角的方法。最后，使用共焦拉曼光谱研究了激光诱导损伤的影响，观察到在强激光辐照后拉伸应变增加高达36%。然而，我们报告称，在进行600°C热处理后，诱导应变降低了高达约50%，且观察到的应变有相当程度的均匀化。

补充信息

在线版本包含可在10.1007/s00339-023-06755-2获取的补充材料。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/643f/10271884/5fa228206385/339_2023_6755_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/643f/10271884/af3434aa8d25/339_2023_6755_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/643f/10271884/79a0e4dd84ef/339_2023_6755_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/643f/10271884/4a9ac8ac1e33/339_2023_6755_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/643f/10271884/592d2630b5a1/339_2023_6755_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/643f/10271884/5fa228206385/339_2023_6755_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/643f/10271884/af3434aa8d25/339_2023_6755_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/643f/10271884/79a0e4dd84ef/339_2023_6755_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/643f/10271884/4a9ac8ac1e33/339_2023_6755_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/643f/10271884/592d2630b5a1/339_2023_6755_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/643f/10271884/5fa228206385/339_2023_6755_Fig5_HTML.jpg

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