Laser Micro/Nano-Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, PR China.
Yangtze Delta Region Academy of Beijing Institute of Technology, Jiaxing, PR China.
Nat Commun. 2023 Jul 5;14(1):3967. doi: 10.1038/s41467-023-39760-3.
Downsizing electrode architectures have significant potential for microscale energy storage devices. Asymmetric micro-supercapacitors play an essential role in various applications due to their high voltage window and energy density. However, efficient production and sophisticated miniaturization of asymmetric micro-supercapacitors remains challenging. Here, we develop a maskless ultrafast fabrication of multitype micron-sized (10 × 10 μm) micro-supercapacitors via temporally and spatially shaped femtosecond laser. MXene/1T-MoS can be integrated with laser-induced MXene-derived TiO and 1T-MoS-derived MoO to generate over 6,000 symmetric micro-supercapacitors or 3,000 asymmetric micro-supercapacitors with high-resolution (200 nm) per minute. The asymmetric micro-supercapacitors can be integrated with other micro devices, thanks to the ultrahigh specific capacitance (220 mF cm and 1101 F cm), voltage windows in series (52 V), energy density (0.495 Wh cm) and power density (28 kW cm). Our approach enables the industrial manufacturing of multitype micro-supercapacitors and improves the feasibility and flexibility of micro-supercapacitors in practical applications.
缩小电极结构对于微尺度储能器件具有重要的潜力。由于具有高电压窗口和能量密度，非对称微超级电容器在各种应用中起着至关重要的作用。然而，高效生产和复杂的微型化非对称微超级电容器仍然具有挑战性。在这里，我们通过时间和空间成形的飞秒激光开发了一种无掩模的超快制造多种类型的微米级（10×10μm）微超级电容器的方法。MXene/1T-MoS 可以与激光诱导的 MXene 衍生的 TiO 和 1T-MoS 衍生的 MoO 集成，以每分钟产生超过 6000 个对称微超级电容器或 3000 个具有高分辨率（200nm）的非对称微超级电容器。由于超高的比电容（220 mF cm 和 1101 F cm）、串联电压窗口（52 V）、能量密度（0.495 Wh cm）和功率密度（28 kW cm），非对称微超级电容器可以与其他微设备集成。我们的方法可以实现多种类型微超级电容器的工业制造，提高微超级电容器在实际应用中的可行性和灵活性。
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