Mu Haoran, Smith Daniel, Katkus Tomas, Gailevičius Darius, Malinauskas Mangirdas, Nishijima Yoshiaki, Stoddart Paul R, Ruan Dong, Ryu Meguya, Morikawa Junko, Vasiliev Taras, Lozovski Valeri, Moraru Daniel, Ng Soon Hock, Juodkazis Saulius
Optical Sciences Centre, Australian Research Council (ARC) Industrial Transformation Training Centre in Surface Engineering for Advanced Materials (SEAM), Swinburne University of Technology, Hawthorn, VIC 3122, Australia.
Laser Research Center, Physics Faculty, Vilnius University, Sauletekio Ave. 10, LT-10222 Vilnius, Lithuania.
Micromachines (Basel). 2023 Mar 31;14(4):798. doi: 10.3390/mi14040798.
Microlens arrays (MLAs) which are increasingly popular micro-optical elements in compact integrated optical systems were fabricated using a femtosecond direct laser write (fs-DLW) technique in the low-shrinkage SZ2080 photoresist. High-fidelity definition of 3D surfaces on IR transparent CaF substrates allowed to achieve ∼50% transmittance in the chemical fingerprinting spectral region 2-5 μm wavelengths since MLAs were only ∼10 μm high corresponding to the numerical aperture of 0.3 (the lens height is comparable with the IR wavelength). To combine diffractive and refractive capabilities in miniaturised optical setup, a graphene oxide (GO) grating acting as a linear polariser was also fabricated by fs-DLW by ablation of a 1 μm-thick GO thin film. Such an ultra-thin GO polariser can be integrated with the fabricated MLA to add dispersion control at the focal plane. Pairs of MLAs and GO polarisers were characterised throughout the visible-IR spectral window and numerical modelling was used to simulate their performance. A good match between the experimental results of MLA focusing and simulations was achieved.
微透镜阵列(MLA)是紧凑型集成光学系统中越来越受欢迎的微光学元件,它是在低收缩率的SZ2080光刻胶中使用飞秒直接激光写入(fs-DLW)技术制造的。由于MLA的高度仅约为10μm,对应于0.3的数值孔径(透镜高度与红外波长相当),因此在红外透明CaF基板上对3D表面进行高保真定义,使得在2-5μm波长的化学指纹光谱区域能够实现约50%的透过率。为了在小型化光学装置中结合衍射和折射能力,还通过fs-DLW对1μm厚的氧化石墨烯(GO)薄膜进行烧蚀,制造了用作线性偏振器的氧化石墨烯(GO)光栅。这种超薄的GO偏振器可以与制造的MLA集成,以在焦平面上增加色散控制。在整个可见-红外光谱窗口对MLA和GO偏振器对进行了表征,并使用数值建模来模拟它们的性能。MLA聚焦的实验结果与模拟结果实现了良好匹配。