Ma Dong, Li JiaKun, Feng Qibo, Zhao YuQiong, Cui Jianying, Wu Lihong
Opt Express. 2023 Jul 17;31(15):24127-24141. doi: 10.1364/OE.493982.
The rotary axis is the basis of rotational motion. The motion errors of a rotary axis have an extremely important impact on the accuracy of precision machining measuring equipment such as CNC machines, robot manipulators, and laser trackers. It is a difficult problem to realise the fast and precision simultaneous measurement of multi-degree-of-freedom motion errors of a rotary axis. Therefore, a novel method for the simultaneous measurement of six-degree-of-freedom motion errors of a rotary axis by a single-mode fiber coupled semiconductor laser is proposed in this paper. The corresponding system is developed, which has the advantages of high measurement efficiency, simple structure and low cost. A phase-solving method taking the advantages of both the eight-subdivision and the Cordic algorithm is proposed to solve the phase of interference signal, cannot only realize the high-resolution solving of the current signal phase but also quickly obtain high-precision interferometric results. A series of experiments were carried out on the developed system. An experimental system was built and a series of experiments were performed. The experimental results show that the standard deviation of stability for 1 hour of the six-degree-of-freedom measurement is 0.03 µm, 0.02 µm, 0.03 µm, 0.10 , 0.05 and 0.03 , respectively. The repeatability deviation of measuring a rotary axis is ±0.16 µm, ± 0.29 µm, ± 0.25 µm, ± 0.65 , ± 0.62 and ±13.42 , respectively. The maximum deviation of comparison with standard instruments is 0.46 µm, 1.00 µm, 0.49 µm, 1.06 , 1.53 and 0.74 , respectively. It provides a low-cost and high-precision measurement method for simultaneous measurement of six-degree-of-freedom motion errors of rotary axis of precision machining and measuring equipment.
旋转轴是旋转运动的基础。旋转轴的运动误差对数控机床、机器人操纵器和激光跟踪仪等精密加工测量设备的精度有着极其重要的影响。实现旋转轴多自由度运动误差的快速、精确同步测量是一个难题。因此，本文提出了一种利用单模光纤耦合半导体激光器同步测量旋转轴六自由度运动误差的新方法。开发了相应的系统，该系统具有测量效率高、结构简单、成本低等优点。提出了一种结合八分法和科迪克算法优点的相位求解方法来求解干涉信号的相位，不仅能实现电流信号相位的高分辨率求解，还能快速获得高精度的干涉测量结果。在开发的系统上进行了一系列实验。搭建了实验系统并进行了一系列实验。实验结果表明，六自由度测量1小时的稳定性标准差分别为0.03 µm、0.02 µm、0.03 µm、0.10 、0.05 和0.03 。测量旋转轴的重复性偏差分别为±0.16 µm、±0.29 µm、±0.25 µm、±0.65 、±0.62 和±13.42 。与标准仪器比较的最大偏差分别为0.46 µm、1.00 µm、0.49 µm、1.06 、1.53 和0.74 。它为精密加工和测量设备旋转轴六自由度运动误差的同步测量提供了一种低成本、高精度的测量方法。
