Li Jiakun, Feng Qibo, Bao Chuanchen, Zhao Yuqiong
Opt Express. 2018 Feb 5;26(3):2535-2545. doi: 10.1364/OE.26.002535.
The rotary axis is the basis for rotational motion. Its motion errors have critical effects on the accuracy of the related equipment, such as a five-axis computer numerical control machine tool. There are several difficult problems in the implementation of high-precision and fast measurement of the multi-degree-of-freedom motion errors of a rotary axis. In this paper, a novel method for the simultaneous measurement of five-degree-of-freedom motion errors of a rotary axis is proposed, which uses a single-mode fiber-coupled laser with a full-circle measuring range. It has the advantages of high efficiency, low cost, and it requires no decoupling calculation. An experimental system was built and a series of experiments were performed. The standard deviation of stability for 60 min of the five-degree-of-freedom measurement is 0.05 arcsec, 0.06 arcsec, 0.04 μm, 0.03 μm, and 0.19 arcsec, respectively. The repeatability deviation of measuring an indexing table is ± 3.4 arcsec, ± 4.6 arcsec, ± 2.6 μm, ± 2.4 μm, and ± 3.2 arcsec. The maximum deviation of comparison is 3.9 arcsec and 3.2 arcsec. These results demonstrate the effectiveness of the proposed method; thus, a new approach of simultaneous measurement of the multi-degree-of-freedom motion errors of a rotary axis is provided.
旋转轴是旋转运动的基础。其运动误差对相关设备（如五轴计算机数控机床）的精度有着关键影响。在实现旋转轴多自由度运动误差的高精度快速测量方面存在若干难题。本文提出了一种新颖的旋转轴五自由度运动误差同时测量方法，该方法采用具有全圆周测量范围的单模光纤耦合激光器。它具有高效、低成本且无需解耦计算的优点。构建了实验系统并进行了一系列实验。五自由度测量60分钟的稳定性标准偏差分别为0.05角秒、0.06角秒、0.04微米、0.03微米和0.19角秒。测量分度台的重复性偏差为±3.4角秒、±4.6角秒、±2.6微米、±2.4微米和±3.2角秒。比较的最大偏差为3.9角秒和3.2角秒。这些结果证明了所提方法的有效性，从而为旋转轴多自由度运动误差的同时测量提供了一种新途径。
