Wang Ke, Liao Yiming, Guo Yaozu, Zhou Shuyu, Liu Jie, Yan Feng, Ji Xiaoli
Opt Express. 2023 Jul 17;31(15):24952-24963. doi: 10.1364/OE.495772.
The suppression of the crosstalk in a CMOS THz detector is essential for enhancing the performance of detector arrays; however, it presents several technical challenges at the chip level. In this paper, a novel structure featuring a mushroom-like artificial magnetic conductor (M-AMC) is developed to suppress the crosstalk between CMOS THz detectors with on-chip antennas. Three-dimensional simulation results show that the M-AMC structure, which is designed by metal Al and doped-Si materials in the CMOS process, not only reduces the transmission coefficient of the electromagnetic wave between adjacent pixels but also enhances the electric field of the target pixels. A 0.65 THz detector array with a M-AMC structure based on the on-chip antenna was fabricated. Experimental results present that after implanting the M-AMC structure, the noise equivalent power (NEP) at the central frequency of pixels significantly decreases by 315.5%. Moreover, the distribution of NEP becomes more uniform, as evidenced by a reduction in the standard deviation coefficient of 26.3%. This demonstrates the effectiveness of the method in suppressing crosstalk and improving the responsivity of CMOS THz detectors, which can be used for high-performance THz detector arrays.
抑制CMOS太赫兹探测器中的串扰对于提高探测器阵列的性能至关重要；然而，这在芯片层面带来了若干技术挑战。本文提出了一种具有蘑菇状人工磁导体（M-AMC）的新颖结构，以抑制带有片上天线的CMOS太赫兹探测器之间的串扰。三维模拟结果表明，采用CMOS工艺中的金属铝和掺杂硅材料设计的M-AMC结构，不仅降低了相邻像素间电磁波的传输系数，还增强了目标像素的电场。制作了基于片上天线的具有M-AMC结构的0.65太赫兹探测器阵列。实验结果表明，植入M-AMC结构后，像素中心频率处的噪声等效功率（NEP）显著降低了315.5%。此外，NEP的分布变得更加均匀，标准偏差系数降低了26.3%即证明了这一点。这证明了该方法在抑制串扰和提高CMOS太赫兹探测器响应度方面的有效性，可用于高性能太赫兹探测器阵列。
