退火对喷雾热解法制备的TiO薄膜物理性能的影响。
Annealing effect on the physical properties of TiO thin films deposited by spray pyrolysis.
作者信息
Alaya Y, Souissi R, Toumi M, Madani M, El Mir L, Bouguila N, Alaya S
机构信息
Gabès University, Laboratoire de Physique des Matériaux et des Nanomatériaux Appliquée à l'Environnement, Faculté des Sciences de Gabès Cité Erriadh, Zrig 6072 Gabès Tunisia
Carthage University, Laboratoire des Matériaux, Molécules et Applications IPEST BP 51, La Marsa 2070, Tunis Tunisia.
出版信息
RSC Adv. 2023 Jul 19;13(32):21852-21860. doi: 10.1039/d3ra02387g.
Titanium dioxide (TiO) thin films were deposited on glass substrates at 350 °C using the spray pyrolysis technique. As deposited and annealed thin films were characterized by X-ray diffraction, scanning electron microscopy, UV-VIS spectroscopy, and photodetection. Unlike the as deposited samples which were amorphous, annealed samples show an anatase phase. Films were absorbent in the UV region and the band gap energy decreases from 3.78 eV to 3.4 eV with annealing. The photoresponse of TiO photodetectors was recorded under UV ( = 365 nm, = 254 nm) and visible light illumination by reversible switching (ON/OFF) cycles using DC electrical characterization. Photosensitive properties such as reproducible photosensitivity, responsivity, and detectivity were also studied.
采用喷雾热解技术在350℃下将二氧化钛（TiO₂）薄膜沉积在玻璃基板上。对沉积态和退火后的薄膜进行了X射线衍射、扫描电子显微镜、紫外-可见光谱和光检测表征。与沉积态时为非晶态的样品不同，退火后的样品呈现锐钛矿相。薄膜在紫外区域有吸收，且随着退火，带隙能量从3.78电子伏特降至3.4电子伏特。通过使用直流电学表征的可逆开关（开/关）循环，记录了TiO₂光电探测器在紫外光（λ = 365纳米、λ = 254纳米）和可见光照射下的光响应。还研究了诸如可重复的光敏性、响应度和探测率等光敏特性。
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