Lassnig Alice, Zak Stanislav
Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, 8700 Leoben, Austria.
J Mater Res. 2023;38(13):3324-3335. doi: 10.1557/s43578-023-01057-y. Epub 2023 Jun 18.
Extracting mechanical data of thin films on rigid substrates using nanoindentation is compromised by the mechanical properties of underlying substrates, which may falsify the obtained results. With ongoing miniaturization, the substrate influence becomes more pronounced. In this study we present an experimental approach to extract the true Young's modulus of crystalline-amorphous multilayers by means of nanoindentation. We used 1 µm thick multilayers comprised of amorphous CuZr and nanocrystalline Cu. All films were deposited onto two rigid substrate types with Young's moduli below and above the ones expected for the deposits (film-to-substrate hardness and elastic moduli ratios between 0.3 to 1.1 and 0.6 to 1.5, respectively). Linear extrapolation of indentation data to zero indentation depth allows to precisely determine the real film's Young's modulus. Same investigations were performed on monolithic Cu and CuZr films of same thickness. While the hardness values change with the variation of the bilayer thickness of the multilayer structures, the Young's modulus is not affected by the interfaces.
使用纳米压痕法提取刚性基板上薄膜的力学数据会受到下层基板力学性能的影响，这可能会使所得结果产生偏差。随着不断的小型化，基板的影响变得更加显著。在本研究中，我们提出了一种通过纳米压痕法提取晶体 - 非晶多层膜真实杨氏模量的实验方法。我们使用了由非晶态CuZr和纳米晶态Cu组成的1μm厚的多层膜。所有薄膜都沉积在两种刚性基板上，这两种基板的杨氏模量分别低于和高于沉积物预期的杨氏模量（薄膜与基板的硬度和弹性模量比分别在0.3至1.1和0.6至1.5之间）。将压痕数据线性外推至零压痕深度可以精确确定真实薄膜的杨氏模量。对相同厚度的整体式Cu和CuZr薄膜进行了相同的研究。虽然硬度值随多层结构双层厚度的变化而变化，但杨氏模量不受界面的影响。
