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通过纳米压头尖端锐度控制薄膜中的应变局部化。

Controlling strain localization in thin films with nanoindenter tip sharpness.

作者信息

Zak Stanislav

机构信息

Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, 8700, Leoben, Austria.

出版信息

Sci Rep. 2024 Oct 26;14(1):25500. doi: 10.1038/s41598-024-77457-9.

DOI:10.1038/s41598-024-77457-9
PMID:39462027
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11513985/
Abstract

Thin film nanoindentation has increased interest due to its usage in various applications. It is virtually impossible to measure thin film elastic modulus without the substrate influence. Several different methods exist to obtain the true thin film's elastic modulus with no attention given to investigate what parameters can improve insight into thin film mechanical property measurement. A key parameter is the tip radius. This work is aimed at quantifying the influence of the tip radius on the strain field under the indenter. Three Berkovich indentation tips with different tip radii were used for thin multilayer nanoindentation with numerical modelling. The results confirm the existence of the large elastically deformed zone, with a strong localization under the tip. Comparison between the experiments and numerical model shows direct connection between the tip radius and strain localization affecting the experiment, emphasizing importance of knowing the tip radius.

摘要

由于薄膜纳米压痕在各种应用中的使用，其关注度日益提高。在不考虑基底影响的情况下，几乎不可能测量薄膜的弹性模量。存在几种不同的方法来获得真实薄膜的弹性模量，但却没有人关注研究哪些参数可以增进对薄膜力学性能测量的理解。一个关键参数是尖端半径。这项工作旨在量化尖端半径对压头下方应变场的影响。使用三个具有不同尖端半径的贝氏压头进行多层薄膜纳米压痕实验，并进行数值模拟。结果证实了存在大的弹性变形区，且在尖端下方有强烈的局部化现象。实验与数值模型之间的比较表明，尖端半径与影响实验的应变局部化之间存在直接联系，这突出了了解尖端半径的重要性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/1c3fecbea774/41598_2024_77457_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/8a05d63cc8bc/41598_2024_77457_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/b87b442127d2/41598_2024_77457_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/70fd8cf9c670/41598_2024_77457_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/c135df15ed61/41598_2024_77457_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/629eb17c7d11/41598_2024_77457_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/818df575b8b7/41598_2024_77457_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/e23292be878a/41598_2024_77457_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/1c3fecbea774/41598_2024_77457_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/8a05d63cc8bc/41598_2024_77457_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/b87b442127d2/41598_2024_77457_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/70fd8cf9c670/41598_2024_77457_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/c135df15ed61/41598_2024_77457_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/629eb17c7d11/41598_2024_77457_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/818df575b8b7/41598_2024_77457_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/e23292be878a/41598_2024_77457_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b6be/11513985/1c3fecbea774/41598_2024_77457_Fig8_HTML.jpg

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本文引用的文献

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2
Bridging Fidelities to Predict Nanoindentation Tip Radii Using Interpretable Deep Learning Models.利用可解释深度学习模型建立保真度以预测纳米压痕尖端半径
JOM (1989). 2022;74(6):2195-2205. doi: 10.1007/s11837-022-05233-z. Epub 2022 Apr 1.
3
An overview of microscale indentation fatigue: Composites, thin films, coatings, and ceramics.
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Micron. 2021 Sep;148:103110. doi: 10.1016/j.micron.2021.103110. Epub 2021 Jul 1.