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A Retrofittable Photoelectron Gun for Low-Voltage Imaging Applications in the Scanning Electron Microscope.

作者信息

Quigley Frances, Downing Clive, McGuinness Cormac, Jones Lewys

机构信息

School of Physics, Trinity College Dublin, College Green, Dublin D02 PN40, Ireland.

Advanced Microscopy Laboratory, Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin D02 PN40, Ireland.

出版信息

Microsc Microanal. 2023 Sep 29;29(5):1610-1617. doi: 10.1093/micmic/ozad075.

DOI:10.1093/micmic/ozad075
PMID:37490647
Abstract

Low-voltage scanning electron microscopy is a powerful tool for examining surface features and imaging beam-sensitive materials. Improving resolution during low-voltage imaging is then an important area of development. Decreasing the effect of chromatic aberration is one solution to improving the resolution and can be achieved by reducing the energy spread of the electron source. Our approach involves retrofitting a light source onto a thermionic lanthanum hexaboride (LaB6) electron gun as a cost-effective low energy-spread photoelectron emitter. The energy spread of the emitter's photoelectrons is theorized to be between 0.11 and 0.38 eV, depending on the photon energy of the ultraviolet (UV) light source. Proof-of-principle images have been recorded using this retrofitted photoelectron gun, and an analysis of its performance is presented.

摘要

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