Wu Shu-Mao, Hao Chen-Bei, Qin Zhen-Hui, Wang Yong, Chen Hua-Yang, Yu Si-Yuan, Chen Yan-Feng
National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China.
State Key Lab of Crystal Materials, Shandong University, Jinan 250100, China.
Micromachines (Basel). 2023 Jun 30;14(7):1341. doi: 10.3390/mi14071341.
This paper proposes a method to realize ideal lithium niobate (LiNbO) A1 resonators. By introducing subwavelength through-holes between the interdigital transducer (IDT) electrodes on the LiNbO surface, all unfavorable spurious modes of the resonators can be suppressed completely. It is convenient and valid for various IDT electrode parameters and different LiNbO thicknesses. Also, this method does not require additional device fabrication steps. At the same time, these through-holes can greatly reduce the suspended area of the LiNbO thin film, thus significantly improving the design flexibility, compactness, mechanical stability, temperature stability, and power tolerance of the resonators (and subsequent filters). It is expected to become an important means to promote the practical application of LiNbO A1 filters and even all Lamb waves filters.
本文提出了一种实现理想铌酸锂（LiNbO）A1谐振器的方法。通过在LiNbO表面的叉指换能器（IDT）电极之间引入亚波长通孔，可以完全抑制谐振器的所有不利杂散模式。该方法对于各种IDT电极参数和不同的LiNbO厚度都方便且有效。此外，该方法不需要额外的器件制造步骤。同时，这些通孔可以大大减小LiNbO薄膜的悬空面积，从而显著提高谐振器（以及后续滤波器）的设计灵活性、紧凑性、机械稳定性、温度稳定性和功率容限。有望成为推动LiNbO A1滤波器乃至所有兰姆波滤波器实际应用的重要手段。
