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微铸电磁线圈在硅微机电系统双稳态可恢复式保险与解除保险装置中的应用研究

Research on the Application of Microcast Electromagnetic Coil in an Si MEMS Bistable Recoverable Safety and Arming Device.

作者信息

Lv Sining, Feng Hengzhen, Lou Wenzhong, Xiao Chuan, Su Wenting, Kan Wenxing, He Bo

机构信息

Science and Technology on Electromechanical Dynamic Control Laboratory, School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China.

出版信息

Micromachines (Basel). 2023 Jun 30;14(7):1346. doi: 10.3390/mi14071346.

DOI:10.3390/mi14071346
PMID:37512656
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10384045/
Abstract

A low-driving energy and bistable recoverable MEMS safety and arming device (S&A), based on microcasting technology and deep silicon etching technology, is proposed to meet safety system requirements. A force-electromagnetic combination solution is constructed for the Si MEMS S&A, with parameters and strength verified, ultimately achieving an S&A size of (13 × 13 × 0.4) mm. Additionally, a low-driving energy U-shaped electromagnetic coil (USEC) model is designed using microcasting technology, and an electrical-magnetic-mechanical coupling mathematical model is established to explore the relationship between design parameters and driving capacity and reliability. With a driving power of 8 V/0.5 A, the model achieves a stable electromagnetic driving force of 15 mN with a travel distance of 0.5 mm. Finally, the fabrication and testing of the USEC and S&A are carried out, with driving capability and S&A disarming ability tests conducted to verify the feasibility of the system design. Compared to the existing S&A, this scheme has the advantages of low-driving energy, recoverability, fast response speed, and strong adaptability.

摘要

为满足安全系统要求，提出了一种基于微铸造技术和深硅刻蚀技术的低驱动能量且双稳态可恢复的微机电系统安全与解除保险装置（S&A）。为硅微机电系统S&A构建了一种力 - 电磁组合解决方案，对其参数和强度进行了验证，最终实现了尺寸为(13×13×0.4)mm的S&A。此外，利用微铸造技术设计了一种低驱动能量的U形电磁线圈（USEC）模型，并建立了电磁 - 机械耦合数学模型，以探索设计参数与驱动能力及可靠性之间的关系。在驱动功率为8V/0.5A的情况下，该模型实现了15mN的稳定电磁驱动力，行程为0.5mm。最后，进行了USEC和S&A的制造与测试，开展了驱动能力和S&A解除保险能力测试，以验证系统设计的可行性。与现有S&A相比，该方案具有低驱动能量、可恢复性、响应速度快和适应性强等优点。

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The Research on Actuation Performance of MEMS Safety-and-Arming Device with Interlock Mechanism.具有联锁机构的MEMS保险与解除保险装置的驱动性能研究
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