Fan Xinyu, Hu Tengjiang, Wang Yifei, Zhao Yulong, Tian Zhongwang, Xue Wei
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
AVIC Xi'an Aeronautics Computing Technique Research Institute, Xi'an 710065, China.
Micromachines (Basel). 2024 Sep 26;15(10):1194. doi: 10.3390/mi15101194.
As the core component of energy transfer in weapon system, safety and arming (S&A) devices affect the safety, reliability, and damage ability of the weapon. Micro-electromechanical systems (MEMS) S&A devices have been widely investigated for their smaller structure size, higher functional integration, and better smart functionality. This paper proposes the design of a multi-physics field-driven MEMS S&A device. The S&A mechanism is composed of a setback mechanism, a spin mechanism, and an electrothermal mechanism, achieving multiphysics-arming. With the coordination of the three mechanisms, the S&A device can produce a 1 mm displacement. The displacement generated allows the S&A device to switch between safety status and arming status. The unlock conditions and overload resistance of each mechanism are obtained by finite element simulation. Based on SOI wafers and silicon oxide wafers, the chips were fabricated and packaged. Several tests were carried out to verify the working condition and overload resistance of the S&A device. The result shows that under a voltage of 11 V and a rotation speed of 8000 r/min, with a size no more than 10 mm × 10 mm × 1.5 mm, the device works smoothly and can withstand an overload of 25,000 g.
作为武器系统能量传递的核心部件，安全与解除保险（S&A）装置影响着武器的安全性、可靠性和毁伤能力。微机电系统（MEMS）S&A装置因其结构尺寸更小、功能集成度更高以及具备更好的智能功能而受到广泛研究。本文提出了一种多物理场驱动的MEMS S&A装置的设计方案。该S&A机构由后坐机构、旋转机构和电热机构组成，实现了多物理场解除保险。在这三种机构的协同作用下，S&A装置能够产生1毫米的位移。产生的位移使S&A装置能够在安全状态和解除保险状态之间切换。通过有限元模拟获得了各机构的解锁条件和抗过载能力。基于绝缘体上硅（SOI）晶圆和氧化硅晶圆制作并封装了芯片。进行了多项测试以验证S&A装置的工作状态和抗过载能力。结果表明，在11伏电压和8000转/分钟的转速下，尺寸不超过10毫米×10毫米×1.5毫米时，该装置工作平稳，能够承受25000g的过载。
