Wang Guoqian, Jiang Shan, Ni Shoudong, Zhang Yan
School of Mechanical and Power Engineering, Nanjing Tech University, Nanjing 211816, China.
Micromachines (Basel). 2023 Jul 9;14(7):1398. doi: 10.3390/mi14071398.
To solve the problem of the nonuniform distribution of temperature and electrolytic products in the electrolyte flow field during through-mask electrochemical micromachining, the use of a rotating cathode with surface structures is proposed. The rotation of the cathode increases the efficiency of heat and mass transfer by the electrolyte flow. Simulations are performed to analyze the influence of the type of surface structure, the number of surface structures, and the rotational speed of the cathode on the electrolyte flow field. The results show that the use of a rotating cathode with surface structures significantly improves the mass transfer efficiency of the electrolyte flow field in comparison with a conventional cathode structure, and, in particular, a grooved rotating cathode can increase the outlet flow velocity by about 23%. An experimental demonstration of micropit array processing shows that the use of a grooved rotating cathode increases the mass transfer efficiency by 34% and the processing efficiency by nearly 40% compared with a smooth-surfaced rotating cathode. The grooved rotating cathode also gives the highest machining accuracy. Using this cathode, a uniform micropit array with an average micropit diameter of 201.83 μm, a diameter standard deviation of 3.49 μm, and a depth standard deviation of 0.87 μm is processed.
为了解决掩膜电化学微加工过程中电解液流场温度和电解产物分布不均的问题，提出使用具有表面结构的旋转阴极。阴极的旋转提高了电解液流动传热传质的效率。进行模拟以分析表面结构类型、表面结构数量和阴极转速对电解液流场的影响。结果表明，与传统阴极结构相比，使用具有表面结构的旋转阴极显著提高了电解液流场的传质效率，特别是带槽旋转阴极可使出口流速提高约23%。微坑阵列加工的实验证明表明，与光滑表面旋转阴极相比，使用带槽旋转阴极可使传质效率提高34%，加工效率提高近40%。带槽旋转阴极的加工精度也最高。使用这种阴极加工出了平均微坑直径为201.83μm、直径标准偏差为3.49μm、深度标准偏差为0.87μm的均匀微坑阵列。
