Liu Wen-Jen, Chang Yung-Huang, Chiang Chia-Chin, Lai Jian-Xin, Chen Yuan-Tsung, Chen Hsiung-Liang, Lin Shih-Hung
Department of Materials Science and Engineering, I-Shou University, Kaohsiung 840, Taiwan.
Bachelor Program in Industrial Technology, National Yunlin University of Science and Technology, 123 University Road, Section 3, Douliou, Yunlin 640301, Taiwan.
Materials (Basel). 2023 Jul 31;16(15):5380. doi: 10.3390/ma16155380.
CoFe-based alloys and rare earth (RE) elements are among the most studied materials in applying magnetic devices to improve soft magnetic characteristics. A series of CoFeSm films are deposited on a glass substrate via the sputtering technique, followed by an annealing process to investigate their effect on microstructural and optical properties of CoFeSm films. In this study, the increase in the thickness of CoFeSm films and annealing temperatures resulted in a smoother surface morphology. The 40 nm CoFeSm films annealed 300 °C are expected to have good wear resistance and adhesive properties due to their high values of H/E ratio and surface energy. Optical transparency also increased due to the smoother surface of the CoFeSm films.
钴铁基合金和稀土(RE)元素是应用磁性器件以改善软磁特性方面研究最多的材料之一。通过溅射技术在玻璃基板上沉积一系列CoFeSm薄膜,随后进行退火处理,以研究其对CoFeSm薄膜微观结构和光学性能的影响。在本研究中,CoFeSm薄膜厚度和退火温度的增加导致表面形貌更光滑。由于具有较高的H/E比和表面能,在300°C退火的40nm CoFeSm薄膜预计具有良好的耐磨性和粘附性能。由于CoFeSm薄膜表面更光滑,其光学透明度也有所提高。