Zhao Yibin, Zhou Jingyu, Jiang Chenkai, Xu Tianlong, Li Kaixin, Zhang Dawei, Sheng Bin
School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China.
Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China.
Polymers (Basel). 2024 Aug 21;16(16):2369. doi: 10.3390/polym16162369.
Flexible, wearable pressure sensors offer numerous benefits, including superior sensing capabilities, a lightweight and compact design, and exceptional conformal properties, making them highly sought after in various applications including medical monitoring, human-computer interactions, and electronic skins. Because of their excellent characteristics, such as simple fabrication, low power consumption, and short response time, capacitive pressure sensors have received widespread attention. As a flexible polymer material, polydimethylsiloxane (PDMS) is widely used in the preparation of dielectric layers for capacitive pressure sensors. The Young's modulus of the flexible polymer can be effectively decreased through the synergistic application of sacrificial template and laser ablation techniques, thereby improving the functionality of capacitive pressure sensors. In this study, a novel sensor was introduced. Its dielectric layer was developed through a series of processes, including the use of a sacrificial template method using NaCl microparticles and subsequent CO laser ablation. This porous PDMS dielectric layer, featuring an array of holes, was then sandwiched between two flexible electrodes to create a capacitive pressure sensor. The sensor demonstrates a sensitivity of 0.694 kPa within the pressure range of 0-1 kPa and can effectively detect pressures ranging from 3 Pa to 200 kPa. The sensor demonstrates stability for up to 500 cycles, with a rapid response time of 96 ms and a recovery time of 118 ms, coupled with a low hysteresis of 6.8%. Furthermore, our testing indicates that the sensor possesses limitless potential for use in detecting human physiological activities and delivering signals.
柔性可穿戴压力传感器具有诸多优点，包括卓越的传感能力、轻巧紧凑的设计以及出色的贴合性，这使其在医疗监测、人机交互和电子皮肤等各种应用中备受青睐。由于具有诸如制作简单、低功耗和短响应时间等优异特性，电容式压力传感器受到了广泛关注。作为一种柔性聚合物材料，聚二甲基硅氧烷（PDMS）被广泛用于制备电容式压力传感器的介电层。通过牺牲模板和激光烧蚀技术的协同应用，可以有效降低柔性聚合物的杨氏模量，从而提高电容式压力传感器的功能。在本研究中，引入了一种新型传感器。其介电层是通过一系列工艺开发而成的，包括使用NaCl微粒的牺牲模板法以及随后的CO激光烧蚀。然后将这种具有一系列孔洞的多孔PDMS介电层夹在两个柔性电极之间，制成电容式压力传感器。该传感器在0 - 1 kPa的压力范围内显示出0.694 kPa的灵敏度，并且能够有效检测3 Pa至200 kPa的压力。该传感器在高达500次循环中表现出稳定性，响应时间为96 ms，恢复时间为118 ms，滞后率低至6.8%。此外，我们的测试表明该传感器在检测人体生理活动和传输信号方面具有无限潜力。
