Tsai Chia-Yu, Lin Yan-Wen, Ku Hong-Ming, Lee Chia-Yen
Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, Taiwan.
Department of Chemical Engineering, King Mongkut's University of Technology Thonburi, Bangkok 10140, Thailand.
Sensors (Basel). 2023 Jul 31;23(15):6818. doi: 10.3390/s23156818.
Infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric film is improved via annealing at 500 °C for 4 h. The voltage response of the fabricated sensors is evaluated experimentally for a substrate thickness of 1 µm over a sensing range of 30 cm. The results show that the voltage signal varies as an inverse exponential function of the distance. A positioning system based on three infrared sensors is implemented in LabVIEW. It is shown that the position estimates obtained using the proposed system are in excellent agreement with the actual locations. In general, the results presented in this study provide a useful source of reference for the further development of MEMS-based pyroelectric infrared sensors.
采用传统的基于微机电系统（MEMS）的薄膜沉积、光刻和蚀刻技术，制造了包含悬浮氧化锌（ZnO）热释电薄膜和隔热硅基板的红外传感器。通过在500°C下退火4小时来提高热释电薄膜的响应度。针对1μm的基板厚度，在30cm的传感范围内对制造的传感器的电压响应进行了实验评估。结果表明，电压信号随距离呈反指数函数变化。在LabVIEW中实现了基于三个红外传感器的定位系统。结果表明，使用所提出的系统获得的位置估计与实际位置非常吻合。总体而言，本研究中呈现的结果为基于MEMS的热释电红外传感器的进一步发展提供了有用的参考来源。
