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通过非理想二维镜的互光强传播。

Mutual optical intensity propagation through non-ideal two-dimensional mirrors.

作者信息

Meng Xiangyu, Wang Yong, Shi Xianbo, Ren Junchao, Sun Weihong, Cao Jiefeng, Li Junqin, Tai Renzhong

机构信息

Shanghai Advanced Research Institute, Chinese Academy of Sciences, 239 Zhangheng Road, Pudong District, Shanghai 201800, People's Republic of China.

Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue, Argonne, IL 60439, USA.

出版信息

J Synchrotron Radiat. 2023 Sep 1;30(Pt 5):902-909. doi: 10.1107/S1600577523006343. Epub 2023 Aug 23.

DOI:10.1107/S1600577523006343
PMID:37610344
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10481273/
Abstract

The mutual optical intensity (MOI) model is a partially coherent radiation propagation tool that can sequentially simulate beamline optics and provide beam intensity, local degree of coherence and phase distribution at any location along a beamline. This paper extends the MOI model to non-ideal two-dimensional (2D) optical systems, such as ellipsoidal and toroidal mirrors with 2D figure errors. Simulation results show that one can tune the trade-off between calculation efficiency and accuracy by varying the number of wavefront elements. The focal spot size of an ellipsoidal mirror calculated with 100 × 100 elements gives less than 0.4% deviation from that with 250 × 250 elements, and the computation speed is nearly two orders of magnitude faster. Effects of figure errors on 2D focusing are also demonstrated for a non-ideal ellipsoidal mirror and by comparing the toroidal and ellipsoidal mirrors. Finally, the MOI model is benchmarked against the multi-electron Synchrotron Radiation Workshop (SRW) code showing the model's high accuracy.

摘要

互光强(MOI)模型是一种部分相干辐射传播工具,它可以依次模拟束线光学,并提供沿束线任意位置的束流强度、局部相干度和相位分布。本文将MOI模型扩展到非理想二维(2D)光学系统,如具有二维形状误差的椭球面镜和 toroidal 镜。模拟结果表明,通过改变波前元素的数量,可以调整计算效率和精度之间的权衡。用100×100个元素计算的椭球面镜焦斑尺寸与用250×250个元素计算的结果偏差小于0.4%,计算速度快近两个数量级。还通过比较 toroidal 镜和椭球面镜,展示了非理想椭球面镜形状误差对二维聚焦的影响。最后,将MOI模型与多电子同步辐射工作室(SRW)代码进行了基准测试,显示了该模型的高精度。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/70dc77336b1d/s-30-00902-fig6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/88275043d6f0/s-30-00902-fig1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/f802eae00bf3/s-30-00902-fig2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/30232282a321/s-30-00902-fig3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/970cdcf34a49/s-30-00902-fig4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/995c8e9f667f/s-30-00902-fig5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/70dc77336b1d/s-30-00902-fig6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/88275043d6f0/s-30-00902-fig1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/f802eae00bf3/s-30-00902-fig2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/30232282a321/s-30-00902-fig3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/970cdcf34a49/s-30-00902-fig4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/995c8e9f667f/s-30-00902-fig5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/db33/10481273/70dc77336b1d/s-30-00902-fig6.jpg

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本文引用的文献

1
Analysis of partially coherent light propagation through the soft X-ray interference lithography beamline at SSRF.部分相干光通过上海光源软X射线干涉光刻光束线传播的分析。
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2
Coherence properties of the high-energy fourth-generation X-ray synchrotron sources.高能第四代 X 射线同步辐射光源的相干性特性。
J Synchrotron Radiat. 2019 Nov 1;26(Pt 6):1851-1862. doi: 10.1107/S1600577519013079.
3
The wave optical whole process design of the soft X-ray interference lithography beamline at SSRF.
上海光源软X射线干涉光刻光束线的波动光学全过程设计
J Synchrotron Radiat. 2018 Nov 1;25(Pt 6):1869-1876. doi: 10.1107/S1600577518012833. Epub 2018 Oct 26.
4
Mutual optical intensity propagation through non-ideal mirrors.相互光强通过非理想反射镜的传播。
J Synchrotron Radiat. 2017 Sep 1;24(Pt 5):954-962. doi: 10.1107/S1600577517010281. Epub 2017 Aug 18.
5
Numerical analysis of partially coherent radiation at soft x-ray beamline.软X射线光束线部分相干辐射的数值分析
Opt Express. 2015 Nov 16;23(23):29675-86. doi: 10.1364/OE.23.029675.
6
Partially coherent X-ray wavefront propagation simulations including grazing-incidence focusing optics.包含掠入射聚焦光学元件的部分相干X射线波前传播模拟
J Synchrotron Radiat. 2014 Sep;21(Pt 5):1110-21. doi: 10.1107/S1600577514013058. Epub 2014 Aug 6.
7
Diffraction-limited storage rings - a window to the science of tomorrow.衍射极限存储环——通往明日科学的一扇窗口。
J Synchrotron Radiat. 2014 Sep;21(Pt 5):837-42. doi: 10.1107/S1600577514019286. Epub 2014 Aug 31.
8
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