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上海光源软X射线干涉光刻光束线的波动光学全过程设计

The wave optical whole process design of the soft X-ray interference lithography beamline at SSRF.

作者信息

Xue Chaofan, Meng Xiangyu, Wu Yanqing, Wang Yong, Wang Liansheng, Yang Shumin, Zhao Jun, Tai Renzhong

机构信息

Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility, Shanghai 201800, People's Republic of China.

出版信息

J Synchrotron Radiat. 2018 Nov 1;25(Pt 6):1869-1876. doi: 10.1107/S1600577518012833. Epub 2018 Oct 26.

DOI:10.1107/S1600577518012833
PMID:30407200
Abstract

A new spatially coherent beamline has been designed and constructed at the Shanghai Synchrotron Radiation Facility. Here, the design of the beamline is introduced and the spatial coherence is analyzed throughout the whole process by wave optics. The simulation results show good spatial coherence at the endstation and have been proven by experiment results.

摘要

上海同步辐射装置已设计并建造了一条新的空间相干光束线。本文介绍了该光束线的设计,并通过波动光学在整个过程中对空间相干性进行了分析。模拟结果表明在实验站具有良好的空间相干性,且已得到实验结果的验证。

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