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靶功率对磁控溅射非晶碳涂层微观结构、摩擦学性能及生物相容性的影响

Effect of Target Power on Microstructure, Tribological Performance and Biocompatibility of Magnetron Sputtered Amorphous Carbon Coatings.

作者信息

Dhandapani Vishnu Shankar, Subbiah Ramesh, Thangavel Elangovan, Kim Chang-Lae, Kang Kyoung-Mo, Veeraraghavan Veeravazhuthi, Park Kwideok, Kim Dae-Eun, Park Dongkyou, Kim Byungki

机构信息

Department of Electromechanical Convergence Engineering, Korea University of Technology and Education, Cheonan 31253, Republic of Korea.

School of Mechatronics Engineering, Korea University of Technology and Education, Cheonan 31253, Republic of Korea.

出版信息

Materials (Basel). 2023 Aug 24;16(17):5788. doi: 10.3390/ma16175788.

DOI:10.3390/ma16175788
PMID:37687480
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10489061/
Abstract

The tribological properties and preosteoblast behavior of an RF magnetron-sputtered amorphous carbon coating on a Si (100) substrate were evaluated. The graphite target power was varied from 200 to 500 W to obtain various coating structures. The amorphous nature of the coatings was confirmed via Raman analysis. The contact angle also increased from 58º to 103º, which confirmed the transformation of the a-C surface from a hydrophilic to hydrophobic nature with an increasing graphite target power. A minimum wear rate of about 4.73 × 10 mm/N*mm was obtained for an a-C coating deposited at a 300 W target power. The 300 W and 400 W target power coatings possessed good tribological properties, and the 500 W coating possessed better cell viability and adhesion on the substrate. The results suggest that the microstructure, wettability, tribological behavior and biocompatibility of the a-C coating were highly dependent on the target power of the graphite. A Finite Element Analysis (FEA) showed a considerable increase in the Von Mises stress as the mesh size decreased. Considering both the cell viability and tribological properties, the 400 W target power coating was identified to have the best tribological property as well as biocompatibility.

摘要

对硅(100)衬底上射频磁控溅射非晶碳涂层的摩擦学性能和成骨前体细胞行为进行了评估。改变石墨靶功率从200瓦到500瓦以获得各种涂层结构。通过拉曼分析证实了涂层的非晶性质。接触角也从58°增加到103°,这证实了随着石墨靶功率增加,非晶碳表面从亲水性转变为疏水性。对于在300瓦靶功率下沉积的非晶碳涂层,获得了约4.73×10⁻⁶mm³/N·mm的最小磨损率。300瓦和400瓦靶功率的涂层具有良好的摩擦学性能,500瓦的涂层在衬底上具有更好的细胞活力和附着力。结果表明,非晶碳涂层的微观结构、润湿性、摩擦学行为和生物相容性高度依赖于石墨的靶功率。有限元分析(FEA)表明,随着网格尺寸减小,冯·米塞斯应力显著增加。综合考虑细胞活力和摩擦学性能,确定400瓦靶功率的涂层具有最佳的摩擦学性能和生物相容性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/c6798b76ce8a/materials-16-05788-g008.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/0fe7baf2ba8f/materials-16-05788-g005.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/c74919af8854/materials-16-05788-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/c6798b76ce8a/materials-16-05788-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/6983c335b057/materials-16-05788-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/7b3b5fc9e260/materials-16-05788-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/4fc5079836fd/materials-16-05788-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/877e75ca4fde/materials-16-05788-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/0fe7baf2ba8f/materials-16-05788-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/b9e7ad84c514/materials-16-05788-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/c74919af8854/materials-16-05788-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/770e/10489061/c6798b76ce8a/materials-16-05788-g008.jpg

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